Power module semiconductor device and inverter equipment, and fabrication method of the power module semiconductor device, and metallic mold

ABSTRACT

The power module semiconductor device (2) includes: an insulating substrate (10); a first pattern (10a) (D) disposed on the insulating substrate (10); a semiconductor chip (Q) disposed on the first pattern; a power terminal (ST, DT) and a signal terminal (CS, G, SS) electrically connected to the semiconductor chip; and a resin layer (12) configured to cover the semiconductor chip and the insulating substrate. The signal terminal is disposed so as to be extended in a vertical direction with respect to a main surface of the insulating substrate.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a continuation application (CA) of PCT Application No.PCT/JP2013/074895, filed on Sep. 13, 2013, which claims priority toJapan Patent Applications No. P2012-206947 filed on Sep. 20, 2012 andP2012-207194 filed on Sep. 20, 2012 and is based upon and claims thebenefit of priority from prior Japanese Patent Applications No.P2012-206947 filed on Sep. 20, 2012 and P2012-207194 filed on Sep. 20,2012 and PCT Application No. PCT/JP2013/074895, filed on Sep. 13, 2013,the entire contents of each of which are incorporated herein byreference.

FIELD

The embodiments described herein relates to a power module semiconductordevice and inverter equipment, and a fabrication method of the powermodule semiconductor device, and a metallic mold thereof. In particular,the embodiments relates to a power module semiconductor device havingstraight wiring structure, low-inductance inverter equipment, and apower module semiconductor device of a vertical terminal transfermoldand a fabrication method thereof, and a metallic mold thereof.

BACKGROUND

Many research institutions are currently conducting research to developSilicon Carbide (SiC) devices. Advantages of SiC power devices over Sipower devices include low on resistance, high switching speed, hightemperature operation, etc.

Conventional Si power devices, such as Insulated Gate BipolarTransistors (IGBTs), are limited to about 150° C. maximum operatingtemperature.

However, SiC based devices can theoretically operate to temperatures of600° C.

In conventional Si power modules, since losses produced by Si powerdevices are relatively larger, high power cannot be output due to aproblem of heat generation. Since high thermal resistance of powermodules can be tolerated in instead of inability to output high power,the thickness of power modules were increased in consideration of aninfluence of warpage, thereby reaching the limits of miniaturization ofpower modules.

SiC power modules can conduct a large electric current, and can beeasily operated under high temperature conditions operation, sincelosses produced by Si power devices are relatively smaller. However,thin type power module design has been required for achieving such SiCpower modules.

Case type packages is used as packages of the SiC power devices.

On the other hand, there is also disclosed a semiconductor device whichis resin-sealed by transfermold technique.

Moreover, there is also disclosed a transfermold in which a press-fitvertical terminal is formed by integrally molding a socket and thenpresses fit a terminal therein.

SUMMARY

There are commonly used case type power modules in which signalterminals are disposed in a vertical direction with respect to a mainunit of the power module.

On the other hand, in transfermold-structured modules where thinstructure is realizable as compared with the case type power modules, apower terminal and a signal terminal are horizontally disposed withrespect to an outer periphery of a mold. For this reason, restrictionsoccur in a creepage surface for securing an insulation between terminalsand between a heat sink and the terminal. Moreover, when the modules aredisposed in parallel, a distance between modules must be secured,thereby causing a space demerit.

Furthermore, in the case of vertically stacked structure in which acontrol substrate and passive components are mounted in a verticaldirection on a module, it is necessary to perform post processes, e.g. aprocess for bending signal terminals in the vertical direction.Accordingly, the number of fabricating processes is increased and abreak etc. may occur in a bending part of the signal terminal during thepost processes, such as the bending process.

The embodiments described herein provide a power module semiconductordevice having a vertical terminal transfermold in which structurethereof is simple and the number of parts is reduced, thereby achievingspace saving, a fabrication method of such a power module semiconductordevice, and a metallic mold thereof.

Moreover, embodiments provide a power module semiconductor device ofwhich a power terminal has straight wiring structure, and low seriesinductance inverter equipment.

According to one aspect of the embodiments, there is provided a powermodule semiconductor device comprising: an insulating substrate; a firstpattern of a copper plate layer disposed on the insulating substrate; asemiconductor chip disposed on the first pattern; a power terminal and asignal terminal electrically connected to the semiconductor chip; and aresin layer configured to cover the semiconductor chip and theinsulating substrate, wherein the signal terminal is disposed so as tobe extended in a vertical direction with respect to a main surface ofthe insulating substrate.

According to another aspect of the embodiments, there is provided afabrication method of a power module semiconductor device, the methodcomprising: mounting the power module semiconductor device on a lowermetallic mold, the lower metallic mold comprising a main unit mountingunit, a terminal mounting unit of a power terminal, and a fixingmechanism configured to fix a signal terminal thereto; fixing the signalterminal to the fixing mechanism; engaging the lower metallic mold withan upper metallic mold; injecting a resin to a space for resin injectionformed between the lower metallic mold and the upper metallic mold;removing the upper metallic mold from the lower metallic mold; andremoving the resin sealed power module semiconductor device.

According to still another aspect of the embodiments, there is provideda metallic mold comprising: a main unit mounting unit of a power modulesemiconductor device; a terminal mounting unit of the power terminal ofthe power module semiconductor device; a lower metallic mold comprisinga fixing mechanism configured to fix the signal terminal of the powermodule semiconductor device; and an upper metallic mold engaged with thelower metallic mold.

According to still another aspect of the embodiments, there is provideda power module semiconductor device, wherein the power terminal isdisposed so as to be extended and from mutually opposite side surfacesof the resin layer in mutually opposite directions, along a long-sidedirection of the resin layer, in parallel with a main surface of theresin layer, thereby forming straight wiring structure.

According to still another aspect of the embodiments, there is providedan inverter equipment comprising a plurality of power modulesemiconductor devices having straight wiring structure disposed inparallel, wherein power terminals of the respective power modulesemiconductor device are connected to each other with a bus barelectrode.

According to the embodiments, there can be provided a power modulesemiconductor device having a vertical terminal transfermold in whichstructure thereof is simple and the number of parts is reduced, therebyachieving space saving, a fabrication method of such a power modulesemiconductor device, and a metallic mold thereof.

Moreover, according to the embodiments, there can be provided a powermodule semiconductor device of which a power terminal has straightwiring structure, and low series inductance inverter equipment.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic bird’s-eye view configuration diagram showing aone-in-one (1-in-1 module), which is a power module semiconductor deviceaccording to a comparative example.

FIG. 2 is a schematic bird’s-eye view configuration diagram showing a1-in-1 module, before forming a resin layer thereon, which is the powermodule semiconductor device according to the comparative example.

FIG. 3 is a schematic bird’s-eye view configuration diagram showing a1-in-1 module, before forming an upper surface plate electrode thereon,which is the power module semiconductor device according to thecomparative example.

FIG. 4 is a schematic planar pattern configuration diagram showing the1-in-1 module, which is the power module semiconductor device accordingto the comparative example.

FIG. 5 is a schematic cross-sectional structure diagram taken in theline I-I of FIG. 4 .

FIG. 6 is a schematic circuit configuration diagram of a three-phasealternating current (AC) inverter equipment composed by disposing sixpieces of the power module semiconductor devices according to thecomparative example.

FIG. 7 is a schematic plane configuration of the three-phase AC inverterequipment composed by disposing the six pieces of the power modulesemiconductor devices according to the comparative example, and aconnection diagram between the respective terminals thereof.

FIG. 8A is a schematic plane configuration diagram also includingconnection wiring (bus bar) electrodes (GNDL, POWL) connected betweeneach power terminal in the three-phase AC inverter equipment composed bydisposing the six pieces of the power module semiconductor devicesaccording to the comparative example.

FIG. 8B is a schematic cross-sectional structure diagram taken in theline II-II of FIG. 8A.

FIG. 9 is a schematic circuit representative diagram showing a 1-in-1module, which is a power module semiconductor device according to afirst embodiment.

FIG. 10 is a detail circuit representative diagram showing the 1-in-1module, which is the power module semiconductor device according to thefirst embodiment.

FIG. 11 is a bird’s-eye view of a power module semiconductor devicehaving straight wiring structure according to the first embodiment.

FIG. 12 is a schematic plane configuration diagram of the power modulesemiconductor device having the straight wiring structure according tothe first embodiment.

FIG. 13A is a schematic cross-sectional structure diagram taken in theline III-III of FIG. 12 .

FIG. 13B is another schematic cross-sectional structure diagram taken inthe line III-III of FIG. 12 .

FIG. 13C is still another schematic cross-sectional structure diagramtaken in the line III-III of FIG. 12 .

FIG. 14 is a schematic cross-sectional structure diagram taken in theline IV-IV of FIG. 12 .

FIG. 15 is a schematic planar pattern configuration diagram showing the1-in-1 module, which is a power module semiconductor device according tothe first embodiment.

FIG. 16 is a schematic cross-sectional structure diagram taken in theline V-V of FIG. 15 .

FIG. 17 is a schematic cross-sectional structure diagram taken in theline VI-VI of FIG. 15 .

FIG. 18 is a schematic cross-sectional structure diagram taken in theline VII-VII of FIG. 15 .

FIG. 19 is a schematic cross-sectional structure diagram taken in theline VIII-VIII of FIG. 15 .

FIG. 20 is a schematic circuit configuration diagram of a three-phase ACinverter composed by disposing six pieces of the power modulesemiconductor devices according to the first embodiment.

FIG. 21 is a connection diagram between the respective terminals of thethree-phase AC inverter composed by disposing the six pieces of thepower module semiconductor devices according to the first embodiment.

FIG. 22 is a schematic plane configuration diagram also includingconnection wiring (bus bar) electrodes (GNDL, POWL) connected betweeneach power terminal in the three-phase AC inverter composed by disposingthe six pieces of the power module semiconductor devices according tothe first embodiment.

FIG. 23A is a schematic cross-sectional structure diagram taken in theline IX-IX of FIG. 22 .

FIG. 23B is a schematic cross-sectional structure diagram taken in theline X-X of FIG. 22 .

FIG. 24A is another schematic cross-sectional structure diagram taken inthe line IX-IX of FIG. 22 .

FIG. 24B is another schematic cross-sectional structure diagram taken inthe line X-X of FIG. 22 .

FIG. 25A is still another schematic cross-sectional structure diagramtaken in the line IX-IX of FIG. 22 .

FIG. 25B is still another schematic cross-sectional structure diagramtaken in the line X-X of FIG. 22 .

FIG. 26 is a diagram showing an example of disposing the signal terminalelectrodes (SS, G, CS) in a zigzag lattice pattern, in a schematic planeconfiguration diagram also including the connection wiring (bus bar)electrodes (GNDL, POWL) connected between each power terminal of thethree-phase AC inverter composed by disposing the six pieces of thepower module semiconductor devices according to the first embodimentshown in FIG. 22 .

FIG. 27 is a diagram showing an example of disposing a control substrateand a power source substrate on a surface of the three-phase ACinverter, in a schematic plane configuration diagram also including theconnection wiring (bus bar) electrodes (GNDL, POWL) connected betweeneach power terminal of the three-phase AC inverter composed by disposingthe six pieces of the power module semiconductor devices according tothe first embodiment shown in FIG. 22 .

FIG. 28 is a schematic cross-sectional structure diagram taken in theline XI-XI of FIG. 27 .

FIG. 29 is an example of a photograph of a surface of a controlsubstrate applied to the three-phase AC inverter composed by disposingthe six pieces of the power module semiconductor devices according tothe first embodiment.

FIG. 30 is an example of a photograph of a back side surface of thecontrol substrate applied to the three-phase AC inverter composed bydisposing the six pieces of the power module semiconductor devicesaccording to the first embodiment.

FIG. 31 is a schematic bird’s-eye view of disposing a control substrateand a power source substrate on the three-phase AC inverter composed bydisposing the six pieces of the power module semiconductor devicesaccording to the first embodiment.

FIG. 32 is a circuit configuration diagram of a full bridge invertercomposed by disposing four pieces of the power module semiconductordevices according to the first embodiment.

FIG. 33 is a schematic plane configuration diagram also including theconnection electrodes (GNDL, POWL) connected between each power terminalof the full bridge inverter composed by disposing the four pieces of thepower module semiconductor devices according to the first embodiment.

FIG. 34 is a schematic cross-sectional structure diagram of SiC MetalOxide Semiconductor Field-Effect Transistor (MOSFET), which is anexample of a semiconductor chip applied to the power modulesemiconductor device according to the first embodiment.

FIG. 35 is a schematic cross-sectional structure diagram showing the SiCMOSFET including a source pad electrode SP and a gate pad electrode GP,which is an example of the semiconductor chip applied to the powermodule semiconductor device according to the first embodiment.

FIG. 36 is an example of a circuit configuration in which a snubbercapacitor is connected between a power terminal PL and an earth terminal(ground terminal) NL in a schematic circuit configuration of thethree-phase AC inverter composed using the power module semiconductordevices according to the first embodiment.

FIG. 37 is a schematic circuit configuration diagram of the three-phaseAC inverter composed using the power module semiconductor devicesaccording to the first embodiment.

FIG. 38A is a schematic plane configuration diagram of a carbon jig usedfor a soldering process between the power terminals ST, DT and thesignal terminals CS, G, SS in a fabrication method of the power modulesemiconductor device according to the first embodiment.

FIG. 38B is a schematic plane configuration diagram showing an aspect ofmounting the power module semiconductor device on the carbon jig toperform the soldering process between the power terminals ST, DT and thesignal terminals CS, G, SS.

FIG. 39 is a schematic cross-sectional structure diagram taken in thecutting line XII-XII of FIG. 38B in a long-side direction of the carbonjig mounted on a hot plate, wherein the power module semiconductordevice is mounted on the carbon jig.

FIG. 40 is a schematic cross-sectional structure diagram for explaininga process of sealing a transfermold resin, in the fabrication method ofthe power module semiconductor device according to the first embodiment.

FIG. 41A is a top view diagram of a lower metallic mold used in thefabrication method of the power module semiconductor device according tothe first embodiment.

FIG. 41B is a schematic cross-sectional structure diagram taken in theline XIII-XIII of FIG. 41A.

FIG. 42A is a top view diagram of an upper metallic mold used in thefabrication method of the power module semiconductor device according tothe first embodiment.

FIG. 42B is a schematic cross-sectional structure diagram taken in theline XIV-XIV of FIG. 42A.

FIG. 43A is a planar photographic view showing a fixing mechanism of thesemiconductor chip used in the fabrication method of the power modulesemiconductor device according to the first embodiment.

FIG. 43B is a top view diagram of the fixing mechanism of thesemiconductor chip.

FIG. 44A is a planar photographic view showing a part of the lowermetallic mold used in the fabrication method of the power modulesemiconductor device according to the first embodiment.

FIG. 44B is a top view diagram showing the part of the lower metallicmold.

FIG. 45A is a planar photographic view showing a part of the uppermetallic mold used in the fabrication method of the power modulesemiconductor device according to the first embodiment.

FIG. 45B is a top view diagram showing the part of the upper metallicmold.

FIG. 46A is a top view diagram showing a state where the fixingmechanism of the semiconductor chip is mounted on the lower metallicmold used in the fabrication method of the power module semiconductordevice according to the first embodiment.

FIG. 46B is an enlarged view of the part D of FIG. 46A.

FIG. 47A is a perspective diagram showing a state of the fixingmechanism of the semiconductor chip in a first molding process of thepower module semiconductor device according to the first embodiment.

FIG. 47B is a schematic cross-sectional structure diagram taken in theline XV-XV of FIG. 47A.

FIG. 48A is a perspective diagram showing a state of the fixingmechanism of the semiconductor chip in a second molding process of thepower module semiconductor device according to the first embodiment.

FIG. 48B is a schematic cross-sectional structure diagram taken in theline XVI-XVI of FIG. 48A.

FIG. 49A is a perspective diagram showing a state of the fixingmechanism of the semiconductor chip in a third molding process of thepower module semiconductor device according to the first embodiment.

FIG. 49B is a schematic cross-sectional structure diagram taken in theline XVII-XVII of FIG. 49A.

FIG. 50A is a perspective diagram showing a state of the fixingmechanism of the semiconductor chip in a fourth molding process of thepower module semiconductor device according to the first embodiment.

FIG. 50B is a schematic cross-sectional structure diagram taken in theline XVIII-XVIII of FIG. 50A.

FIG. 51A is a perspective diagram showing a state of the fixingmechanism of the semiconductor chip in a fifth molding process of thepower module semiconductor device according to the first embodiment.

FIG. 51B is a schematic cross-sectional structure diagram taken in theline XIX-XIX of FIG. 51A.

FIG. 52A is a perspective diagram showing a state of the fixingmechanism of the semiconductor chip, and the upper metallic mold, in asixth molding process of the power module semiconductor device accordingto the first embodiment.

FIG. 52B is a schematic cross-sectional structure diagram taken in theline XX-XX of FIG. 52A.

FIG. 53A is a perspective diagram showing a state where a resin isinjected therein in a seventh molding process of the power modulesemiconductor device according to the first embodiment.

FIG. 53B is a schematic cross-sectional structure diagram taken in theline XXI-XXI of FIG. 53A.

FIG. 54A is a perspective diagram showing a state where the power modulesemiconductor device is removed, in an eighth molding process of thepower module semiconductor device according to the first embodiment.

FIG. 54B is a schematic cross-sectional structure diagram taken in theline XXII-XXII of FIG. 54A.

FIG. 55A is a schematic cross-sectional structure diagram showing a partof the lower metallic mold according to another example used in thefabrication method of the power module semiconductor device according tothe first embodiment.

FIG. 55B is a schematic cross-sectional structure diagram showing astate where the semiconductor chip is mounted on the lower metallic moldaccording to the other example.

FIG. 56A is a schematic cross-sectional structure diagram showing astate where the upper metallic mold is set on the lower metallic moldaccording to the other example used in the fabrication method of thepower module semiconductor device according to the first embodiment.

FIG. 56B is a schematic cross-sectional structure diagram showing astate where a resin is injected between the lower metallic mold and theupper metallic mold according to the other example.

FIG. 57A is a schematic cross-sectional structure diagram showing astate where the power module semiconductor device molded into the lowermetallic mold according to the other example used in the fabricationmethod of the power module semiconductor device according to the firstembodiment is mounted.

FIG. 57B is a schematic cross-sectional structure diagram showing thepower module semiconductor device removed from the lower metallic mold.

FIG. 58 is a schematic bird’s-eye view configuration diagram showing a1-in-1 module, which is a power module semiconductor device according toa second embodiment.

FIG. 59 is a schematic bird’s-eye view configuration diagram of the1-in-1 module before forming a resin layer thereon, which is the powermodule semiconductor device according to the second embodiment.

FIG. 60 is a schematic bird’s-eye view configuration diagram of the1-in-1 module before forming an upper surface plate electrode thereon,which is the power module semiconductor device according to the secondembodiment.

FIG. 61 is a schematic planar pattern configuration diagram showing the1-in-1 module, which is the power module semiconductor device accordingto the second embodiment.

FIG. 62 is a schematic back side external configuration diagram showingthe 1-in-1 module, which is the power module semiconductor deviceaccording to a second embodiment.

FIG. 63 is a schematic cross-sectional structure diagram taken in theline XXIII-XXIII of FIG. 61 .

FIG. 64 is a schematic bird’s-eye view configuration diagram showing a1-in-1 module, which is a power module semiconductor device according toa third embodiment.

FIG. 65 is a schematic planar pattern configuration diagram showing the1-in-1 module, which is the power module semiconductor device accordingto the third embodiment.

FIG. 66 is a schematic back side external configuration diagram showingthe 1-in-1 module, which is the power module semiconductor deviceaccording to the third embodiment.

FIG. 67 is a schematic cross-sectional structure diagram taken in theline XXIV-XXIV of FIG. 65 .

FIG. 68 is a schematic enlarged cross-sectional structure diagram of theportion A shown in FIG. 67 .

FIG. 69 is a schematic planar pattern configuration diagram of theportion B shown in FIG. 68 .

FIG. 70 is a schematic cross-sectional structure diagram taken in theline XXV-XXV of FIG. 69 .

FIG. 71 is a schematic circuit representative diagram showing a two inone (2-in-1) module, which is a power module semiconductor deviceaccording to a fourth embodiment.

FIG. 72 is a schematic bird’s-eye view configuration diagram showing the2-in-1 module, which is the power module semiconductor device accordingto the fourth embodiment.

FIG. 73 is a schematic bird’s-eye view configuration diagram of the2-in-1 module before forming a resin layer thereon, which is the powermodule semiconductor device according to the fourth embodiment.

FIG. 74 is a schematic bird’s-eye view configuration diagram of the2-in-1 module before forming an upper surface plate electrode thereon,which is the power module semiconductor device according to the fourthembodiment.

FIG. 75 is a schematic planar pattern configuration diagram showing the2-in-1 module, which is the power module semiconductor device accordingto the fourth embodiment.

FIG. 76 is a schematic cross-sectional structure diagram taken in theline XXVI-XXVI of FIG. 75 .

FIG. 77 is a schematic back side external configuration diagram showingthe 2-in-1 module, which is the power module semiconductor deviceaccording to the fourth embodiment.

FIG. 78 is a schematic plane configuration diagram of the three piecesof the power module semiconductor devices according to the fourthembodiment disposed in parallel in order to drive a three-phase ACinverter.

FIG. 79 is a schematic plane configuration diagram of the three piecesof the power module semiconductor devices according to the fourthembodiment disposed in parallel, which drives a three-phase AC inverter.

DESCRIPTION OF EMBODIMENTS

Next, the embodiments will be described with reference to drawings. Inthe description of the following drawings, the identical or similarreference numeral is attached to the identical or similar part. However,it should be noted that the drawings are schematic and therefore therelation between thickness and the plane size and the ratio of thethickness of each component part differs from an actual thing.Therefore, detailed thickness and size should be determined inconsideration of the following explanation. Of course, the part fromwhich the relation and ratio of a mutual size differ also in mutuallydrawings is included.

Moreover, the embodiments shown hereinafter exemplify the apparatus andmethod for materializing the technical idea; and the embodiments do notspecify the material, shape, structure, placement, etc. of eachcomponent part as the following. The embodiments may be changed withoutdeparting from the spirit or scope of claims.

Comparative Example

A power module semiconductor device 2 a according to a comparativeexample is provided with a configuration of a 1-in-1 module. Morespecifically, one MOSFETQ is included in one module. As an example, sixchips (MOS transistor x 6) can be mounted thereon, and a maximum of sixpieces of the MOSFETs can be respectively connected to one another inparallel. Note that it is also possible to mount a part of six pieces ofthe chips for the diode DI.

As shown in FIG. 1 , the power module semiconductor device 2 a accordingto the comparative example includes: a drain terminal DT and a sourceterminal ST which are disposed on a first side of the ceramic substrate10 covered with the resin layer 12; and signal terminals SS, G, CS, B1,B2 disposed on a side opposite to the first side. In this case, thesignal terminals SS, G, CS correspond to the source sense terminal, thegate signal terminal, and the current sense terminal of thesemiconductor chip Q, and the signal terminals B1, B2 correspond to thethermistor connecting terminal.

Moreover, FIG. 2 illustrates a schematic bird’s-eye view configurationof the power module semiconductor device 1 before forming a resin layer12 thereon.

Furthermore, FIG. 3 illustrates a schematic bird’s-eye viewconfiguration of the power module semiconductor device 2, before formingan upper surface plate electrode 22 thereon.

Moreover, FIG. 4 illustrates a schematic planar pattern configuration ofthe 1-in-1 module, which is the power module semiconductor device 2 aaccording to the comparative example. FIG. 5 illustrates a schematiccross-sectional structure taken in the line I-I of FIG. 4 .

As shown in FIGS. 1-4 , the power module semiconductor device 2 aaccording to the comparative example includes: a ceramic substrate 10; afirst pattern 10 a (D) of a first copper plate layer 10 a disposed onthe surface of the ceramic substrate 10; a semiconductor chip Q disposedon the first pattern 10 a (D) ; a first pillar connection electrode 18_(p) disposed on the first pattern 10 a (D); and a drain terminal DTconnected to the first pillar connection electrode 18 _(p). Moreover,the power module semiconductor device 2 s includes: a second pattern 10a (EP) of the first copper plate layer 10 a; a second pillar connectionelectrode 18 _(n) disposed on the second pattern 10 a (EP) ; and asource terminal ST connected to the second pillar connection electrode18 _(n). Moreover, the power module semiconductor device 2 a includes apillar electrode 20 disposed on the semiconductor chip Q. Moreover, thepower module semiconductor device 2 a includes an upper surface plateelectrode 22 disposed via a soldering layer 3 a on the pillar electrode20 and the second pillar connection electrode 18 _(n).

FIG. 6 illustrates a schematic circuit configuration of three-phasealternating current (AC) inverter equipment 4 a composed by disposingsix pieces of the power module semiconductor devices 2 a according tothe comparative example, and FIG. 7 illustrates a schematic planeconfiguration of the three-phase AC inverter equipment, and a connectiondiagram between the respective terminals thereof.

FIG. 8A illustrates a schematic plane configuration also includingconnection wiring (bus bar) electrodes (GNDL, POWL) connected betweeneach power terminal in the three-phase AC inverter equipment 4 acomposed by disposing the six pieces of the power module semiconductordevices according to the comparative example, and FIG. 8B illustrates aschematic cross-sectional structure taken in the line II-II of FIG. 8A.

In the power module semiconductor device 2 a according to thecomparative example, a current conducting path is used as a U-turn path,i.e., from the drain terminal DT to an inside of a main unit of thepower device, and further from the inside of the main unit of the powerdevice to the source terminal ST.

It is effective that parasitic components (inductance, resistancecomponent, etc.) can be canceled with such a path in which the currentconducting path is U-turned. Moreover, there is advantages that a powersource is easy to disposed at a side of the source terminal ST and drainterminal DT, and a control unit etc. is easy to disposed at a side ofthe signal terminals SS, G, CS, B1, B2.

However, if composing three-phase AC inverter equipment 4 a, it isnecessary to dispose a plurality of the power module semiconductordevices 2 a in parallel, as shown in FIGS. 7 and 8 . Accordingly, ifusing such a package configuration in which the electric current isU-turned, there is a high possibility that the parasitic components ofmodule wiring (bus bar etc.) will become larger after all as the wholeinverter equipment. More specifically, the parasitic component in themodule is reduced, but a length of external wiring is increased.Accordingly, it is difficult to reduce parasitic component, as the wholeinverter equipment.

Moreover, the source terminal ST and the drain terminal DT are exposedfrom the same side surface of the package. Accordingly, as shown in FIG.8 , it is necessary to perform a bending process of the bus barelectrodes GNDL, POWL used for wiring, in order to secure an insulationdistance at the time of connecting between terminals, thereby degradingthe wiring efficiency.

Furthermore, the source terminal ST and the drain terminal DT aredisposed at the same side surface of the package. Accordingly, if aplurality of the power module semiconductor devices 2 a are disposed inparallel, the distance in the disposed direction becomes relativelylonger, and thereby the installation area increases and coolingmechanisms etc. are upsized.

First Embodiment Configuration of Semiconductor Device

FIG. 9 illustrates a schematic circuit representative of a 1-in-1module, which is a power module semiconductor device 2 according to afirst embodiment. Moreover, FIG. 10 illustrates a detail circuitrepresentative of the 1-in-1 module, which is the power modulesemiconductor device 2 according to the first embodiment.

The power module semiconductor device 2 according to the firstembodiment has a configuration of 1-in-1 module. More specifically, oneMOSFETQ is included in one module. As an example, five chips (MOStransistor × 5) can be mounted thereon, and a maximum of five pieces ofthe MOSFETs can be respectively connected to one another in parallel.Note that it is also possible to mount a part of five pieces of thechips for the diode DI thereon.

The diode DI connected to the MOSFETQ inversely in parallel is shown inFIG. 9 . A main electrode of the MOSFETQ is expressed with a drainterminal DT and a source terminal ST.

More particularly, as shown in FIG. 10 , a sense MOSFET Qs is connectedto the MOSFETQ in parallel. The sense MOSFET Qs is formed as aminuteness transistor in the same chip as the MOSFET Q. In FIG. 10 ,reference numeral SS denotes a source sense terminal, reference numeralCS denotes a current sense terminal, and reference numeral G denotes agate signal terminal. Note that, also in the semiconductor chip Qaccording to the first embodiment, the sense MOSFET Qs is formed as aminuteness transistor in the same chip.

FIG. 11 illustrates a schematic bird’s-eye view configuration of a1-in-1 module, which is a power module semiconductor device 2 having astraight wiring structure according to the first embodiment. In thepower module semiconductor device 2 having the straight wiring structureaccording to the first embodiment, the signal terminals SS, G, CS aredisposed so as to be projected in a vertical direction from a resinlayer 12, as shown in FIG. 11 .

Moreover, FIG. 12 illustrates a schematic plane configuration of thepower module semiconductor device 2 having the straight wiring structureaccording to the first embodiment. FIG. 13A illustrates a schematiccross-sectional structure taken in the line III-III of FIG. 12 , FIG.13B illustrates another schematic cross-sectional structure taken in theline III-III of FIG. 12 , and FIG. 13C illustrates still anotherschematic cross-sectional structure taken in the line III-III of FIG. 12. Moreover, FIG. 14 illustrates a schematic cross-sectional structuretaken in the line IV-IV of FIG. 12 .

FIG. 15 illustrates a schematic planar pattern configuration of the1-in-1 module, which is the power module semiconductor device 2 havingthe straight wiring structure according to the first embodiment. FIG. 16illustrates a schematic cross-sectional structure taken in the line V-Vof FIG. 15 , FIG. 17 illustrates a schematic cross-sectional structuretaken in the line VI-VI of FIG. 15 , FIG. 18 illustrates a schematiccross-sectional structure taken in the line VII-VII of FIG. 15 , andFIG. 19 illustrates a schematic cross-sectional structure taken in theline VIII-VIII of FIG. 15 .

As shown in FIGS. 15 and 16 , the power module semiconductor device 2having the straight wiring structure according to the first embodimentincludes: an insulating substrate 10; a first pattern 10 a (D) of acopper plate layer 10 a disposed on the surface of the ceramic substrate10; a semiconductor chip Q disposed on the first pattern 10 a(D); powerterminals ST, DT and signal terminals CS, G, SS, both electricallyconnected to the semiconductor chip Q; and a resin layer 12 configuredto cover the semiconductor chip Q and the insulating substrate 10. Inthis case, the signal terminals CS, G, SS are mutually disposed so as tobe extended in a vertical direction with respect to a main surface ofthe insulating substrate 10; and the power terminals ST, DT are mutuallydisposed so as to be extended from the mutually opposite side surfacesof the resin layer 12 in the mutually opposite directions, along along-side direction of the resin layer 12, in parallel with a mainsurface of the resin layer 12; thereby forming the straight wiringstructure.

In the power module semiconductor device 2 having the straight wiringstructure according to the first embodiment, the power terminals ST, DTare disposed from the side surface of the resin layer 12 in a paralleldirection with the main surface of the resin layer 12, as shown in FIGS.11-16 .

Moreover, the power terminals ST, DT are mutually disposed so as to beextended from the mutually opposite side surfaces of the resin layer 12in the mutually opposite directions, along a long-side direction of theresin layer 12, as shown in FIGS. 11-16 .

Moreover, the power terminals ST, DT are disposed in a thicknessdirection of the resin layer 12 so as to form a predetermined stepheight (difference in level) VD1, VD2, or VD3, as shown in FIGS. 12 and13 .

Moreover, the vertical direction with respect to the main surface of theinsulating substrate 10 is equal to a vertical direction with respect toa main surface of the resin layer 12.

Moreover, the signal terminals CS, G, SS may be linearly disposed on themain surface of the resin layer 12, as shown in FIGS. 11 and 12 .

Moreover, the signal terminal may include a gate signal terminal G and asensor terminal.

Moreover, the sensor terminal may include a source sense terminal SS anda current sense terminal CS. Moreover, thermistor connecting terminalsB1, B2, etc. (not shown therein) used for temperature sensing may bedisposed in the vertical direction with respect to the main surface ofthe insulating substrate 10 in the same manner as the signal terminals,other than the source sense terminal SS and the current sense terminalCS.

Moreover, the power module semiconductor device 2 having the straightwiring structure according to the first embodiment includes electrodepatterns CSP, GSP, SSP disposed so as to be adjacent to thesemiconductor chip Q on the insulating substrate 10, and the signalterminals CS, G, SS may be connected to the electrode patterns CSP, GSP,SSP with soldering.

As shown in FIGS. 15 and 17 , the current sense terminal CS is connectedwith soldering via a soldering layer 3 c to the current sense electrodepattern CSP. Furthermore, the current sense terminal CS is disposed soas to be bent on the gate signal electrode pattern GSP and extended inthe vertical direction respect to the main surface of the insulatingsubstrate 10.

As shown in FIGS. 15 and 18 , the gate signal terminal G is connectedwith soldering via the soldering layer 3 c to the gate signal electrodepattern GSP. Furthermore, the gate signal terminal G is disposed so asto be extended in the vertical direction respect to the main surface ofthe insulating substrate 10.

As shown in FIGS. 15 and 19 , the source sense terminal SS is connectedwith soldering via the soldering layer 3 c to the source sense electrodepattern SSP. Furthermore, the source sense terminal SS is disposed so asto be bent on the gate signal electrode pattern GSP and extended in thevertical direction respect to the main surface of the insulatingsubstrate 10.

Moreover, the insulating substrate 10 may be composed of a ceramicsubstrate. In this case, the ceramic substrate 10 can be formed ofAl₂O₃, AlN, SiN, AlSiC, or SiC of which at least the surface isinsulation, for example.

Furthermore, as shown in FIGS. 15 and 16 , the power modulesemiconductor device 2 according to the first embodiment includes: asecond pattern 10 a (S) of the first copper plate layer 10 a; a pillarelectrode 20 disclosed on the semiconductor chip Q; an upper surfaceplate electrode 22 disposed on the pillar electrode 20; a drain terminalDT disposed on the first pattern 10 a (D); a pillar connection electrode18 _(n) disposed on the second pattern 10 a (S) and connected to theupper surface plate electrode 22; and a source terminal ST connected tothe pillar connection electrode 18 _(n).

The power terminals ST, DT include: a source terminal ST connected to asource pad electrode SP (refer to FIG. 35 ) of the semiconductor chip Q;and a drain terminal DT connected to a drain electrode pattern D (referto FIGS. 34 and 35 ) of the semiconductor chip Q. Moreover, the sourceterminal ST is connected to the source pad electrode SP of thesemiconductor chip Q, and the drain terminal DT is connected to thedrain electrode pattern D of the semiconductor chip Q.

Moreover, as shown in FIGS. 15 and 16 , the current sense terminal CS,the gate signal terminal G, and the source sense terminal SS of thesemiconductor chip Q is respectively bonding connected via bonding wiresto the current sense electrode pattern CSP, the source sense electrodepattern SSP, and the source sense electrode pattern SSP disposed so asto be adjacent to the semiconductor chip Q.

Moreover, the first pattern 10 a (D) and the semiconductor chip Q arebonded to each other via the soldering layer 3 b, and the pillarconnection electrode 18 _(n) and the second pattern 10 a (S) are alsobonded to each other via the soldering layer 3 b.

Moreover, the pillar electrode 20 and the upper surface plate electrode22 are bonded to each other via the soldering layer 3 a, and the pillarconnection electrode 18 _(n) is also bonded to the upper surface plateelectrode 22 and the source terminal ST via the soldering layer 3 a.

The power module semiconductor device 2 according to the firstembodiment may include a diode DI disposed so as to be adjacent to thesemiconductor chip Q on the first pattern 10 a (D) , in the 1-in-1module configuration. A cathode K of the diode DI is connected to thefirst pattern 10 a (D) , and an anode A thereof is connected to theupper surface plate electrode 22 via the pillar electrode 20.

In this case, the semiconductor chip Q is formed of SiC MOSFET, forexample, and the diode DI can be formed of SiC Schottky Barrier Diode(SBD), for example.

The second copper plate layer 10 b disposed on the back side surface ofthe ceramic substrate 10 functions as a heat spreader.

Moreover, the resin layer 12 may be formed of a transfermold resin. Theresin layer 12 may be formed of an epoxy based resin or a silicone basedresin.

A plurality of the semiconductor chips Q are disposed on the surface ofthe ceramic substrate 10 at a position apart from one another in planarview observed from a thickness direction of the ceramic substrate 10,and are resin-molded with the resin layer 12.

Moreover, the pillar connection electrode 18 _(n) may be formed ofelectrode materials of which the value of a Coefficient of ThermalExpansion (CTE) is relatively small, e.g., CuMo, Cu, etc.

A portion of the upper surface plate electrode 22 may be formed ofelectrode materials of which the value of CTE is relatively small, e.g.CuMo, Cu, etc.

A portion of the pillar electrode 20 may be formed of electrodematerials of which the value of CTE is relatively small, e.g. CuMo, Cu,etc.

If materials of the same size of which the values of CTE are equivalentto each other are compared with each other, the generated stress ofmaterials having a larger value of Young’s modulus becomes larger thanthat of materials having a smaller value of Young’s modulus.Accordingly, if materials of which the value of Young’s modulus × CTE issmaller is selected, structural members having a smaller value of thegenerated stress can be obtained.

CuMo has such an advantage. Moreover, although CuMo is inferior to Cu,the electric resistivity of CuMo is also relatively low.

Techniques, e.g. metallic bonding using metallic particles, solid phasediffusion bonding, and Transient Liquid Phase (TLP) bonding, as well asthe solder bonding, are applicable to form a bonded structure of eachstructural member.

For example, a metallic bonded structure is formed by annealing pastematerials containing conductive particles. The annealing temperature ofpaste materials is approximately 200-400° C., for example. Theconductive particles are metallic fine particles which are silverparticles, gold particles, or nickel particles, copper particles, etc.,for example. As an example, if the silver particles are applied asmetallic fine particles, the cardinalities of the silver particles arefrom approximately 80 mass % to approximately 95 mass %, for example.Moreover, an average particle diameter of the silver nanoparticles isfrom approximately 10 nm to approximately 100 nm.

In the vertical terminal internal structure of the power modulesemiconductor device 2 according to the first embodiment, since themetallic terminal parts are soldered directly to the electrode patternsetc., parts, e.g. a socket, are not required.

Three-Phase AC Inverter Configuration

FIG. 20 illustrates a schematic plane configuration of a three-phase ACinverter equipment 4 composed by disposing six pieces of the powermodule semiconductor devices 2 having the straight wiring structureaccording to the first embodiment.

In the power module semiconductor device 2 having the straight wiringstructure according to the first embodiment, since the signal terminalsSS, G, CS are not disposed on the outer periphery of the resin layer 12,as shown in FIG. 20 , a distance between the power modules can bereduced even if the three-phase AC inverter equipment 4 are disposed inparallel.

Moreover, FIG. 20 illustrates a connecting relationship between eachterminal of the three-phase AC inverter equipment 4 composed bydisposing and six pieces of the power module semiconductor devices 2having the straight wiring structure according to the first embodiment.

FIG. 22 illustrates a schematic plane configuration also includingconnection wiring (bus bar) electrodes (GNDL, POWL) connected betweeneach power terminal in the three-phase AC inverter equipment 4 composedby disposing the six pieces of the power module semiconductor devices 2having the straight wiring structure according to the first embodiment.

The transistors Q1, Q4, Q2, Q5, Q3, Q6 respectively compose half bridgeinverters.

As shown in FIG. 21 and FIG. 22 , drain terminals DT1, DT2, DT3 of thetransistors Q1, Q2, Q3 are commonly connected to one another with a busbar electrode POWL used for power source, and source terminals ST4, ST5,ST6 of the transistors Q4, Q5, Q6 are commonly connected to one anotherwith a bus bar electrode GNDL used for earth (ground).

Moreover, as shown in FIGS. 21 and 22 , the source terminals ST1, ST2,ST3 of the transistors Q1, Q2, Q3 are respectively connected in commonto the drain terminals DT4, DT5, DT6 of the transistors Q4, Q5, Q6 withbus bar electrodes UL, VL, WL. As a result, 3-phase (U, V, and W phases)outputs (AC Inverter) can be respectively obtained from the bus barelectrodes UL, VL, WL.

Moreover, FIG. 23A illustrates a schematic cross-sectional structuretaken in the line IX-IX of FIG. 22 , and FIG. 23B illustrates aschematic cross-sectional structure taken in the line X-X of FIG. 22 .

Moreover, FIG. 24A illustrates another schematic cross-sectionalstructure taken in the line IX-IX of FIG. 22 , and FIG. 24B illustratesanother schematic cross-sectional structure taken in the line X-X ofFIG. 22 .

Moreover, FIG. 25A illustrates still another schematic cross-sectionalstructure taken in the line IX-IX of FIG. 22 , and FIG. 25B illustratesstill another schematic cross-sectional structure taken in the line X-Xof FIG. 22 .

Moreover, the power terminals ST, DT are disposed in a thicknessdirection of the transfermold resin layer so as to form a predeterminedstep height (difference in level) VD1, VD2, or VD3, as shown in FIGS. 12and 13 . The example shown in FIG. 23 corresponds to the example offorming the predetermined step height VD1 shown in FIG. 13A, the exampleshown in FIG. 24 corresponds to the example of forming the predeterminedstep height VD2 shown in FIG. 13B, and the example shown in FIG. 25corresponds to the example of forming the predetermined step height VD3shown in FIG. 13C.

In the example of the predetermined step height VD1 shown in FIG. 13A,the bus bar electrodes UL, VL, WL have straight electrode structure inthe same manner as the bus bar electrodes POWL, GNDL.

In the example of the predetermined step height VD2 shown in FIG. 13B,although the bus bar electrodes POWL, GNDL have straight electrodestructure, the bus bar electrodes UL, VL, WL have electrode structurebent upward since the value of the predetermined step height VD2 isrelatively small.

In the example of the predetermined step height VD3 shown in FIG. 13C,although the bus bar electrodes POWL, GNDL have straight electrodestructure, the bus bar electrodes UL, VL, WL have electrode structurebent downward since the value of the predetermined step height VD2 isrelatively large.

FIG. 26 illustrates an example of disposing the signal terminalelectrodes (SS, G, CS) in a zigzag lattice pattern, in the three-phaseAC inverter equipment 4 composed by disposing six pieces of the powermodule semiconductor devices 2 having the straight wiring structureaccording to the first embodiment. Accordingly, in the power modulesemiconductor device 2 having the straight wiring structure according tothe first embodiment, the signal terminals CS, G, SS may be disposed ina zigzag on the main surface of the resin layer 12. Furthermore, thesignal terminals CS, G, SS may be disposed at random on the main surfaceof the resin layer 12.

In the inverter equipment 4 composed by disposing a plurality of thepower module semiconductor devices 2 having the straight wiringstructure according to the first embodiment in parallel, as shown inFIGS. 20-22 , the plurality of the power module semiconductor devices 2having the straight wiring structure are disposed in parallel, and thepower terminals ST, DT of each power module semiconductor device 2 areconnected to each other with the bus bar electrode.

In the inverter equipment 4 composed by disposing the plurality of thepower module semiconductor devices 2 having the straight wiringstructure according to the first embodiment in parallel, the drainterminal DT and the source terminal ST of the power module semiconductordevice are disposed so as to be opposite to a source terminal ST and adrain terminal DT of another power module semiconductor device oppositethereto.

In the inverter equipment 4 composed by disposing the plurality of thepower module semiconductor devices 2 having the straight wiringstructure according to the first embodiment in parallel, the respectivefirst and second transistors (Q1, Q4), (Q2, Q5), and (Q3, Q6) composinghalf bridges are disposed so as to be adjacent to one another, in theplurality of the power module semiconductor devices 2. Furthermore, thesource terminals of the first transistor and the drain terminals of thesecond transistor are respectively disposed so as to be adjacent to oneanother, and the drain terminals of the first transistor and the sourceterminals of the second transistor are respectively disposed so as to beadjacent to one another. More specifically, the terminals (ST1, DT4),(ST2, DT5) and (ST3, DT6) are respectively disposed so as to be adjacentto one another, and the terminals (DT1, ST4), (DT2, ST5), and (DT3, ST6)are respectively disposed so as to be adjacent to one another.

In the power module semiconductor device having the straight wiringstructure according to the first embodiment, the three-phase AC inverterdevice 4 can be compactly composed by including the plurality of thepower module semiconductor devices 2, and connecting the power terminalsof each power module semiconductor device via the bus bar electrodes.

In the power module semiconductor device having the straight wiringstructure according to the first embodiment, wirings of low seriesinductance Ls can be realized by including such a stepped terminalstructure in the straight wiring modular structure.

In the power module semiconductor device having the straight wiringstructure according to the first embodiment, the drain terminal DT andthe source terminal ST are straightly (linearly) disposed in the 1-in-1configuration, and the step height is formed between the drain terminalDT and the source terminal ST, and thereby the (6-in-1) three-phase ACinverter equipment can be easily configured by disposing the modulesside by side in parallel.

Moreover, since the step height is formed between the drain terminal DTand the source terminal ST, the insulation distance between the bus barelectrodes for wiring between the modules can be easily secured, therebyachieving satisfactory wiring efficiency.

Moreover, in the three-phase AC inverter equipment to which the powermodule semiconductor device according to the first embodiment isapplied, the wire length can be reduced and the parasitic seriesinductance Ls can be reduced by approximately 10%, as comparing with thecomparative example of performing the bending process of the wirings(bus bar) in order to secure the insulation distance.

Vertically Stacked Structure

FIG. 27 illustrates an example of disposing a control substrate 6 and apower source substrate 8 above the three-phase AC inverter equipment 4,and FIG. 28 illustrates a schematic cross-sectional structure taken inthe line XI-XI of FIG. 27 , in a schematic plane configuration alsoincluding connection wiring (bus bar) electrodes (GNDL, POWL) connectedbetween each power terminal in the three-phase AC inverter equipment 4composed by disposing the six pieces of the power module semiconductordevices 2 having the straight wiring structure according to the firstembodiment.

As shown in FIGS. 27 and 28 , the three-phase AC inverter equipment 4composed by disposing six pieces of the power module semiconductordevices having the straight wiring structure according to the firstembodiment includes: a control substrate 6 disposed on the plurality ofthe power module semiconductor devices 2 disposed in parallel, andconfigured to control the power module semiconductor devices 2; and apower source substrate 8 disposed on the plurality of the power modulesemiconductor devices 2 disposed in parallel, and configured to supply apower source to the power module semiconductor devices 2 and the controlsubstrate 6, wherein the length of the vertical direction in which thesignal terminals CS, G, SS are extended is an enough length to connectthe signal terminals CS, G, SS to the control substrate 6 and the powersource substrate 8.

FIG. 29 illustrates an example of a photograph of a surface of thecontrol substrate 6 applied to the three-phase AC inverter equipment 4composed by disposing six pieces of the power module semiconductordevices having the straight wiring structure according to the firstembodiment, and FIG. 30 illustrates an example of a photograph of a backside surface of the control substrate.

FIG. 31 illustrates a schematic bird’s-eye view configuration of thecontrol substrate 6 and the power source substrate 8 disposed on thethree-phase AC inverter equipment 4 composed by arranging six pieces ofthe power module semiconductor devices 2 having the straight wiringstructure according to the first embodiment. As shown in FIG. 31 , thesignal terminals (CS1, G1, SS1), (CS2, G2, SS2), (CS3, G3, SS3), (CS4,G4, SS4), (CS5, G5, SS5) and (CS6, G6, SS6) of the six pieces of thepower module semiconductor devices 2 are respectively connected to thecontrol substrate 6 and the power source substrate 8 in verticaldirection, thereby composing the three-phase AC inverter equipment 4.Note that detailed patterns of the control substrate 6 and the powersource substrate 8 are not shown in FIG. 31 for the purpose ofsimplification. Moreover, FIG. 31 illustrates so that the verticaldistance between the power module semiconductor device 2, and thecontrol substrate 6 and power source substrate 8 relatively long inorder to clarify the details of structure, but the distance therebetweenis shortened.

In the three-phase AC inverter equipment composed by arranging sixpieces of the power module semiconductor devices 2 having the straightwiring structure according to the first embodiment, the controlsubstrate, the power source substrate, the snubber capacitor C, etc. canbe easily arranged in the vertically stacked structure, thereby slimmingdown the system.

Full Bridge Inverter Configuration

FIG. 32 illustrates a circuit configuration of a full bridge inverterequipment 5 composed by arranging four pieces of the power modulesemiconductor devices 2 having the straight wiring structure accordingto the first embodiment.

Moreover, FIG. 33 illustrates a schematic plane configuration alsoincluding connection wiring (bus bar) electrodes (GNDL, POWL) connectedbetween each power terminal in the full bridge inverter equipment 5composed by arranging the four pieces of the power module semiconductordevices 2 having the straight wiring structure according to the firstembodiment.

Also in the full bridge inverter equipment composed by arranging fourpieces of the power module semiconductor devices 2 having the straightwiring structure according to the first embodiment, the controlsubstrate, the power source substrate, the snubber capacitor C, etc. canbe easily arranged in the vertically stacked structure, thereby slimmingdown the system.

Configuration Example of Semiconductor Chip

As shown in FIG. 34 , the schematic cross-sectional structure of the SiCMOSFET as an example of the semiconductor chip 100(Q) applied to thepower module semiconductor device 2 according to the first embodimentincludes: a semiconductor substrate 26 composed of an n⁻ type highresistivity layer; a p type base region 28 formed on the surface side ofthe semiconductor substrate 26; source regions 30 formed on the surfaceof the p type base regions 28; a gate insulating film 32 disposed on thesurface of the semiconductor substrate 26 between the p type baseregions 28; a gate electrode 38 disposed on the gate insulating film 32;a source electrode 34 connected to the source region 30 and the p typebase region 28; an n⁺ drain region 24 disposed on a back side surfaceopposite to the surface of the semiconductor substrate 26; and a drainpad electrode 36 connected to the n⁺ drain region 24.

In FIG. 34 , although the semiconductor chip 100 is composed of aplanar-gate-type n channel vertical SiC-MOSFET, the semiconductor chip100 may be composed of a trench-gate-type n channel vertical SiC-MOSFET,etc.

Moreover, a GaN based FET etc. instead of SiC MOSFET are also applicableto the semiconductor chip 100 (Q) applied to the power modulesemiconductor device 2 according to the first embodiment.

Any one of an SiC based power device, a GaN based power device, and anAlN based power device is applicable to the semiconductor chip 100applied to the power module semiconductor device 2 according to thefirst embodiment.

Furthermore, a semiconductor of which the bandgap energy is from 1.1 eVto 8 eV, for example, can be used for the semiconductor chip 100 appliedto the power module semiconductor device 2 according to the firstembodiment.

FIG. 35 illustrates a schematic cross-sectional structure of an SiCMOSFET including a source pad electrode SP and a gate pad electrode GP,which is an example of the semiconductor chip 100 applied to the powermodule semiconductor device 2 according to the first embodiment. Thegate pad electrode GP is connected to the gate electrode 38 disposed onthe gate insulating film 32, and the source pad electrode SP isconnected to the source electrode 34 connected to the source region 30and the p type base region 28.

Moreover, as shown in FIG. 35 , the gate pad electrode GP and the sourcepad electrode SP are disposed on an interlayer insulating film 44 forpassivation which covers the surface of the semiconductor chip 100. Anaddition, microstructural transistor structure may be formed in thesemiconductor substrate 26 below the gate pad electrode GP and thesource pad electrode in the same manner as the center portion shown inFIGS. 34 or 35 (not shown in FIG. 12 ).

Furthermore, as shown in FIG. 35 , the source pad electrode SP may bedisposed to be extended onto the interlayer insulating film 44 forpassivation, also in the transistor structure of the center portion.

In the power module semiconductor device 2 according to the firstembodiment, FIG. 36 illustrates a circuit configuration to connect thesnubber capacitor C between the power terminal PL and the earth terminal(ground terminal) NL. When connecting the power module semiconductordevice 2 according to the first embodiment to the power source E, largesurge voltage Ldi/dt is produced by an inductance L included in aconnection line due to a high switching speed of the SiC device. Forexample, the surge voltage Ldi/dt is expressed as follows: Ldi/dt =3×10⁹ (A/s) , where a current change di=300A, and a time variationaccompanying switching dt = 100 ns. Although a value of the surgevoltage Ldi/dt changes dependent on a value of the inductance L, thesurge voltage Ldi/dt is superimposed on the power source V. Such a surgevoltage Ldi/dt can be absorbed by the snubber capacitor C connectedbetween the power terminal PL and the earth terminal (ground terminal)NL.

Application Examples for Applying Semiconductor Device

Next, there will now be explained a three-phase AC inverter composed byusing the power module semiconductor device 2 according to the firstembodiment with reference to FIG. 37 .

As shown in FIG. 37 , the three-phase AC inverter includes: a gate driveunit 50; a power module unit 52 connected to the gate drive unit 50 anda three-phase alternating current (AC) motor unit 54. Inverters of Uphase, V phase and W phase are connected to the power module unit 52corresponding to U phase, V phase, and W phase of the three-phase ACmotor unit 54. In this case, although the gate drive unit 50 isconnected to the SiC MOSFETs Q1, Q4 as shown in FIG. 35 , the gate driveunit 50 is similarly connected also to the SiC MOSFETs Q2, Q5 and theSiC MOSFETs Q3, Q6 (not shown in FIG. 35 ).

In the power module unit 52, the SiC MOSFETs Q1, Q4, and Q2, Q5, and Q3,Q6 having inverter configurations are connected between a positiveterminal (+) and a negative terminal (-) to which the converter 48 in astorage battery (E) 46 is connected. Furthermore, diodes D1-D6 areconnected inversely in parallel to one another between the source andthe drain of the SiC-MOSFETs Q1 to Q6.

Although the structure of the single phase inverter corresponding to Uphase portion of FIG. 37 has been explained in the power modulesemiconductor device 2 according to the first embodiment, a three-phasepower module unit 52 corresponding to V phase and/or W phase can also beformed in the same manner thereas.

Fabrication Method

FIG. 38A illustrates a schematic plane configuration of a carbon jig 400used for a soldering process between the power terminals ST, DT and thesignal terminals CS, G, SS in a fabrication method of the power modulesemiconductor device according to the first embodiment.

As shown in FIG. 38A, the carbon jig 400 includes: a ceramic substrateinserting unit 402 at the center thereof; and recessed region-shapeddrain terminal DT mounting unit 401 a and source terminal ST mountingunit 401 b at both the right and left ends thereof.

FIG. 38B illustrates a schematic plane configuration showing an aspectof mounting the power module semiconductor device on the carbon jig 400to perform the soldering process between the power terminals ST, DT andthe signal terminals CS, G, SS.

Moreover, FIG. 39 illustrates a schematic cross-sectional structurediagram cutting a long-side direction of the carbon jig 400 mounted on ahot plate 403, wherein the power module semiconductor device 2 ismounted on the carbon jig 400. FIG. 39 corresponds to a schematiccross-sectional structure taken in the line XII-XII of FIG. 38B. Thedashed line portions protectively show the relative positions of thesignal terminals CS, G, SS.

The signal terminals CS, G, SS can be respectively soldered to theelectrode patterns CSP, GSP, SSP by heating the hot plate 403.Similarly, the power terminals ST, DT can be soldered to the pillarconnection electrode 18 _(n) and the first pattern 10 a (D) of the powermodule semiconductor device 2. In this case, if using high melting pointsolder, the hot plate 403 should be heated at approximately 340° C. toapproximately 360° C.

In the fabrication method of the power module semiconductor deviceaccording to the first embodiment, the parallelism of the powerterminals ST, DT and the ceramic substrate 10 is securable by using thecarbon jig 400 having such a structure shown in FIGS. 38-39 .

FIG. 40 illustrates a schematic cross-sectional structure for explaininga process of sealing the transfermold resin, in the fabrication methodof a power module semiconductor device according to the firstembodiment. FIG. 40 shows an aspect that the power module semiconductordevice is turned upside down to be sandwiched with an upper metallicmold 220 and a lower metallic mold 200, and then the upper metallic mold220 and the lower metallic mold 200 are removed after forming the resinlayer 12 by injecting a transfermold resin thereinto. In FIG. 40 ,reference numerals 202, 203 respectively denote a main unit mountingunit and a terminal mounting unit, reference numeral 204 denotes ahousing unit of the signal terminals CS, G, SS, and reference numeral223 denotes a resin injection part.

In the fabrication method of a power module semiconductor deviceaccording to the first embodiment, stepped terminal structure of thepower terminals ST, DT is realized by using the upper metallic mold 220and the lower metallic mold 200 shown in FIG. 40 .

According to the first embodiment, there can be provided the low seriesinductance inverter system with the power module semiconductor devicehaving the straight wiring structure and the 1-in-1 trusted platformmodule (TPM).

Metallic Mold

Hereinafter, there will now be explained a configuration of a metallicmold used in the fabrication method of the power module semiconductordevice according to the first embodiment, with reference to FIGS. 41-46.

The metallic mold applied in the fabrication method of a power modulesemiconductor device according to the first embodiment includes : a mainunit mounting unit of the power module semiconductor device; a terminalmounting unit of the power terminal of the power module semiconductordevice; a lower metallic mold including a fixing mechanism configured tofix the signal terminal of the power module semiconductor device; and anupper metallic mold engaged with the lower metallic mold.

The fixing mechanism includes: a first block member including a linearguide groove to guide the signal terminal; a second block memberincluding a protruding portion engaged with the guide groove, the secondblock member configured to slide movably forward and backward withrespect to the first block member; and a third block member engaged withthe second block member to press the second block member against thefirst block member side, wherein the surface of the second block memberopposite to the third block member has a downward inclined surfaceinclined in a downward direction, and a surface of the third blockmember opposite to the second block member has an upward inclinedsurface inclined in an upward direction.

The lower metallic mold includes a rectangular-shaped housing unit, andthen the fixing mechanism is housed in the housing unit.

Each of the first block member and the third block member includes ascrew hole into which a locking screw screwed in the lower metallic moldside in the housing unit can be inserted. When the locking screw isscrewed and moves to the lower metallic mold, the third block memberproduces a suppress strength in a direction toward the first blockmember with respect to the second block member by the engagement betweenthe inclined surfaces.

Each of the first block member and the second block member includes ascrew hole in which a jack-up screw is screwed.

The screw hole into which the locking screw of the first block membercan be inserted also functions as a screw hole into which the jack-upscrew is screwed.

FIG. 41A is a top view diagram of the lower metallic mold 200 used inthe fabrication method of the power module semiconductor deviceaccording to the first embodiment. FIG. 41B is a schematiccross-sectional structure diagram taken in the line XIII-XIII of FIG.41A.

The lower metallic mold 200 is formed of a metallic plate made offerrous materials etc. subjected to cutting process etc. , for example.

As shown in FIG. 41A, a resin introducing hole 201 passing through thelower metallic mold 200 is formed at approximately center of the lowermetallic mold 200.

Moreover, a guide groove 201 a for guiding a resin introduced from theintroducing hole 201 is formed at a lower part of the introducing hole201.

A main unit mounting unit 202 configured to mount a main unit of thesemiconductor chip thereon to be molded, and terminal mounting units 203a, 203 b configured to mount the drain terminal DT and the sourceterminal ST of the semiconductor chip thereon are formed at a lower partof the guide groove 201 a.

In addition, as shown in FIG. 41B, the terminal mounting unit 203 aconfigured to mount the power terminal DT of the power modulesemiconductor device thereon is formed in a position higher than that ofthe terminal mounting unit 203 b configured to mount the power terminalST thereon, in accordance with a shape of the power module semiconductordevice.

Moreover, as shown in FIG. 41B, the housing unit 204 of the fixingmechanism 205 in the power module semiconductor device is formed so asto pass through the center portion of the main unit mounting unit 202.

In addition, bolt holes 210, 211 each into which a bolt for fixing thelower metallic mold 200 itself to a molding machine is inserted areformed in an edge of the lower metallic mold 200.

FIG. 42A is a top view diagram of the upper metallic mold 220 used inthe fabrication method of the power module semiconductor deviceaccording to the first embodiment. FIG. 42B is a schematiccross-sectional structure diagram taken in the line XIV-XIV of FIG. 42A.

The upper metallic mold 220 is formed of a metallic plate made offerrous materials etc. subjected to cutting process etc. , for example.

As shown in FIG. 42A, a resin introducing hole 221 passing through theupper metallic mold 220 is formed at approximately center of the uppermetallic mold 220.

A resin injection part 223 into which a resin is injected at the time ofbeing superposed on the lower metallic mold 200 is formed at a lowerpart of the introducing hole 221.

Moreover, bank portions 222, 224 for sealing the resin injection part223 so as to be abutted on the lower metallic mold 200 are formed in anoutermost layer of the resin injection part 223.

As shown in FIGS. 42A and 45 , when resin is injected, air vents 225,226 for venting an air from the resin injection part 223 etc. arerespectively formed at bank portions 222, 224.

FIG. 43A is a planar photographic view of the fixing mechanism 205 usedin the fabrication method of the power module semiconductor deviceaccording to the first embodiment, and FIG. 43B is a top view diagram ofthe fixing mechanism 205.

As shown in FIG. 43 , the fixing mechanism 205 is composed of threemetal first block member 250, second block member 251, and third blockmember 252.

A screw hole 250 b into which a locking screw 280 can be inserted (referto FIG. 47 ), and a receiving hole 250 a for receiving a head of thelocking screw are formed in the first block member 250. The lockingscrew 280 is used for fixing the block member 250 to the lower metallicmold 200.

Moreover, guide grooves 250 c for respectively guiding the signalterminals SS, G, CS in a height direction of the second block member 251are formed on a surface of the second block member 251 opposite to thefirst block member 250.

In addition, a female screw formed in the screw hole 250 b is notscrewed with a male screw of the locking screw 280 keeping apredetermined air gap, but is screwed with a male screw of the jack-upscrew 282 mentioned below (refer to FIG. 54 ).

On the other hand, the second block member 251 is a structural memberhoused in the housing unit 204 of the lower metallic mold 200 so as tobe close to or keep a spacing to the fixed first block member 250.

A screw hole 251 b in which a female screw screwed in the jack-up screw283 (refer to FIG. 54 ) is formed, and a receiving hole 251 a forreceiving a head of the jack-up screw 283 are formed in the second blockmember 251.

Moreover, protruding portions 251 c respectively engaged with threepieces of the guide grooves 250 c are formed at a surface of the firstblock member 250 opposite to the guide groove 250 c.

When the guide groove 250 c of the first block member 250 and theprotruding portion 251 c of the second block member 251 are engaged witheach other, a predetermined gap is formed between the both, as shown inFIG. 46 . Thus, signal terminals SS, G, CS are finally held in a stateof being slightly pressed.

Moreover, an inclined surface 251 d as shown in FIG. 49B etc. is formedon a side opposite to the third block member 252.

The third block member 252 is a member engaged with the second blockmember 251, in order to move the second block member 251 to be pressedagainst the first block member 250 side.

A screw hole 252 b into which a locking screw 281 can be inserted (referto FIG. 49 , etc.), and a receiving hole 252 a for receiving a head ofthe locking screw 281 are formed in the third block member 252. Thelocking screw 281 is used for fixing the block member 252 to the lowermetallic mold 200.

Moreover, an inclined surface 252 d as shown in FIG. 49B etc. is formedon a side opposite to the second block member 251.

FIG. 46A is a top view diagram showing a state where the fixingmechanism 205 is mounted on the lower metallic mold, and FIG. 46B is anenlarged view of a part D of FIG. 46A.

If molding (resin sealing) is conducted in a state of the power modulesemiconductor device is mounted on the fixing mechanism 205, the resinis slightly protruded from a minute gap between the lower metallic mold200 and the upper metallic mold 220, and thereby a fin 270 of resin areformed as shown in FIG. 46B. Such a fin 270 will be removed after themolding of the power module semiconductor device is completed.

Molding Process

There will be explained in detail a molding process in the fabricationmethod of the power module semiconductor device according to the firstembodiment, with reference to FIGS. 47-54 . Hereinafter, the moldingprocess explained using FIG. 32 in detail will be explained.

The fabrication method of the power module semiconductor deviceaccording to the first embodiment includes: mounting the power modulesemiconductor device on a lower metallic mold, the lower metallic moldincluding a main unit mounting unit of the power module semiconductordevice, a terminal mounting unit of a power terminal of the power modulesemiconductor device, and fixing mechanism configured to fix a signalterminal of the power module semiconductor device thereto; fixing thesignal terminal to the fixing mechanism; engaging the lower metallicmold with an upper metallic mold; injecting a resin to a space for resininjection formed between the lower metallic mold and the upper metallicmold; removing the upper metallic mold from the lower metallic mold; andremoving the resin sealed power module semiconductor device.

In this case, the step of fixing the signal terminal to the fixingmechanism includes: engaging the signal terminal with a guide groove ofa first block member fixed in the housing unit of the lower metallicmold; slidably mounting a second block member in the housing unit in astate where a protruding portion is opposite to the guide groove side;and pressing the second block member against the first block member sideby disposing a third block member in a state of being contacted with adownward inclined surface of the second block member, and then screwinga locking screw inserted in a screw hole of the third block member inthe lower metallic mold.

The step of removing the power module semiconductor device includes:inserting a jack-up screw in a screw hole for jack-up formed in thefirst block member and the second block member; and clamping the jack-upscrew to jack up the first block member and the second block member fromthe lower metallic mold side.

Firstly, as a first molding process, as shown in FIGS. 47A and 47B, thelocking screw 280 is inserted in the screw hole 250 b of the first blockmember 250 composing the fixing mechanism 205, in order to be fixed tothe lower metallic mold 200.

In addition, although not shown in FIG. 47 etc., the first block member250 is actually fixed in a state of being housed in the housing unit 204of the lower metallic mold 200.

Moreover, the second block member 251 is mounted in the housing unit 204not shown in FIG. 47 in a state of securing a gap 290 with respect tothe first block member 250.

Subsequently, as a second molding process, as shown in FIGS. 48A and48B, the ceramic substrate 10 is mounted thereon so that signalterminals 292 can be settled in the gap 290 between the first blockmember 250 and the second block member 251. Although only a ceramicsubstrate 10 is illustrated in FIGS. 48A and 48B for the purpose of asimplification, the power module semiconductor device 2 according to thefirst embodiment after an electrode forming metalization process of thepower terminals ST, DT and the signal terminals CS, G, SS is actuallymounted thereon.

More specifically, the ceramic substrate 10 is set therein so that thesignal terminals 292 can be settled in the guide grooves 250 c of thefirst block member 250 shown in FIG. 43 . The signal terminals 292 showntherein respectively correspond to the signal terminals CS, G, SS.

The third block member 252 is set in the housing unit 204 (not shown)along the second block member 251.

More specifically, the third block member 252 is set therein so that theinclined surface 251 d at the side of the second block member 251 iscontacted with the inclined surface 252 d at the side of the third blockmember 252, as shown in FIG. 48B.

Subsequently, as a third molding process as shown in FIGS. 49A and 49B,the locking screw 281 is inserted in the screw hole 252 b of the thirdblock member 252, and then as s fourth molding process as shown in FIGS.50A and 50B, the locking screw 281 is clamped to the lower metallic mold200. Although only the ceramic substrate 10 is illustrated in FIGS. 49A,49B, 50A and 50B for the purpose of simplification, the power modulesemiconductor device 2 according to the first embodiment before theresin molding and after the electrode forming metalization processing ofthe power terminals ST, DT and the signal terminals CS, G, SS isactually mounted thereon in the same manner as that shown in FIGS. 48Aand 48B.

Thus, as shown in FIGS. 50A and 50B, a force in a direction of arrow Eacts on the third block member 252 itself via the receiving hole 252 aof the head of screw. The force of the arrow direction E is convertedinto a suppress strength in an arrow direction F which acts on thesecond block member 251 due to an action between the inclined surface252 d at the side of the third block member 252 and the inclined surface251 d at the side of the second block member 251, as shown in FIGS. 50Aand 50B.

The protruding portion 251 c of the second block member 251 is pressedagainst the guide groove 250 c side of the first block member 250 due tothe suppress strength in the arrow direction F.

Thus, as show in FIGS. 51A and 51B as a fifth molding process, thesignal terminal 292 of the power module semiconductor device is heldbetween the guide groove 250 c of the first block member 250 and theprotruding portion 251 c of the second block member 251, and thereby thepower module semiconductor device is fixed thereto. Although only theceramic substrate 10 is illustrated in FIGS. 51A and 51B for the purposeof simplification, but the power module semiconductor device 2 is alsoactually mounted thereon.

Subsequently, as a sixth molding process, as shown in FIGS. 52A and 52B,the upper metallic mold 220 is superposed on the lower metallic mold 200side including the fixing mechanism 205. Although only the ceramicsubstrate 10 is illustrated in FIGS. 52A and 52B for the purpose ofsimplification, but the power module semiconductor device 2 before theresin molding is also actually mounted thereon.

Thus, a space for the air vent 226 used for injecting the resin into theoutermost layer of the power module semiconductor device 2 is formed.

Subsequently, as a seventh molding process, as shown in FIGS. 53A and53B, the molding machine is driven to fill the space with the resinlayer 12. Thus, the power module semiconductor device 2 according to thefirst embodiment is covered to be sealed with the resin layer 12.

Subsequently, as an eighth molding process, as shown in FIGS. 54A and54B, the upper metallic mold 220 is removed therefrom, and the lockingscrews 280, 281 are respectively also removed from the screw hole 250 bof the first block member 250 and the screw hole 252 b of the thirdblock member 252.

Subsequently, the jack-up screw 282 is screwed in the screw hole 250 bof the first block member 250. Moreover, the jack-up screw 283 issimilarly screwed in the screw hole 251 b of the second block member251.

A force in an arrow direction G is applied on the first block member 250and the second block member 251 by clamping the jack-up screws 282, 283,and thereby the molded power module semiconductor device according tothe first embodiment is removed.

Molding Process According to Another Example

There will now be explained a molding process according to anotherexample of the power module semiconductor device 2 according to thefirst embodiment using a lower metallic mold 300, a separate metallicmold 310, and an upper metallic mold 305, with reference to FIGS. 55-57.

FIG. 55A is a schematic cross-sectional structure diagram showing a partof the lower metallic mold 300.

As shown in FIG. 55A, protruding portions 300 a, 300 b for guiding thesignal terminals SS, G, CS of the power module semiconductor device 2are formed in an approximately center of the lower metallic mold 300.

The separate metallic mold 310 composed of separate members 301-303 isfixed above the lower metallic mold 300 with the screws 304.

Trenches into which the signal terminals SS, G, CS of the power modulesemiconductor device 2 are inserted is formed between the protrudingportions 300 a, 300 b and the separate members 301-303.

Subsequently, as shown in FIG. 55B, the signal terminals SS, G, CS ofthe power module semiconductor device 2 are respectively inserted to befixed in the trenches formed between the protruding portions 300 a, 300b and the separate members 301-303.

At this time, the drain terminal DT of the power module semiconductordevice 2 is mounted on the separate member 303, and the source terminalST is mounted on the separate member 301.

Subsequently, as shown in FIG. 56A, the upper metallic mold 305 issuperposed on the separate metallic mold 310. Thus, space 311 used forinjecting a resin into the outermost layer of the power modulesemiconductor device 2 is formed.

Subsequently, as shown in FIG. 56B, the molding machine is driven tofill the space 311 with the resin layer 12. Thus, the power modulesemiconductor device 2 is covered to be sealed with the resin layer 12.

Subsequently, the power module semiconductor device according to thefirst embodiment as shown in FIG. 57B is completed by removing the uppermetallic mold 305, as shown in FIG. 57A.

According to the first embodiment, the whole inverter equipment can beefficiently composed by arranging the signal terminals in thesubstantially vertical direction from the mold body, and the parasiticcomponent can also be reduced since the wirings in the module can alsobe output by the shortest distance.

According to the first embodiment, there can be provided a power modulesemiconductor device having a vertical terminal transfermold in whichstructure thereof is simple and the number of parts is reduced, therebyachieving space saving, since no socket is used.

Second Embodiment

FIG. 58 illustrates a schematic bird’s-eye view configuration of a1-in-1 module, which is a power module semiconductor device according toa second embodiment.

The power module semiconductor device 2 according to the secondembodiment has a configuration of 1-in-1 module. More specifically, oneMOSFETQ is included in one module. In the power module semiconductordevice 2 according to the second embodiment, six chips (MOS transistor ×6) can be mounted thereon, as an example, and a maximum of six pieces ofthe MOSFETs Q can be respectively connected to one another in parallel.Note that it is also possible to mount a part of six pieces of the chipsfor the diode DI.

A schematic circuit expression of the 1-in-1 module, which is a powermodule semiconductor device 2 according to the second embodiment issimilarly illustrated as FIG. 1 , and a detailed circuit expression issimilarly illustrated as FIG. 2 .

In the power module semiconductor device 2 according to the secondembodiment, the power terminals ST, DT are arranged so as to be extendedalong in a parallel direction with a main surface of the resin layer 12from a one side surface of the resin layer 12 in the parallel direction.

As shown in FIG. 58 , the power module semiconductor device 2 accordingto the second embodiment includes: a drain terminal DT and a sourceterminal ST which are arranged on a first side of the ceramic substrate10 covered with the resin layer 12; and signal terminals SS, G, CS, B1,B2 arranged near a side opposite to the first side in a verticaldirection with respect to the ceramic substrate 10. In this case, thesignal terminals SS, G, CS are respectively connected to a source senseterminal, a gate signal terminal, and a current sense terminal of thesemiconductor chip Q. The signal terminals B1, B2 correspond tothermistor connecting terminals. In this case, the source terminal STcorresponds to the first power input terminal, and the drain terminal DTcorrespond to the second power input terminal.

Moreover, FIG. 59 illustrates a schematic bird’s-eye view configurationof the power module semiconductor device 2 before forming a resin layer12 thereon.

Furthermore, FIG. 60 illustrates a schematic bird’s-eye viewconfiguration of the power module semiconductor device 2, before formingan upper surface plate electrode 22 thereon.

Moreover, FIG. 61 illustrates a schematic planar pattern configurationof the 1-in-1 module, which is the power module semiconductor device 2according to the second embodiment. FIG. 63 illustrates a schematiccross-sectional structure taken in the line XXIII-XXIII of FIG. 61 .

Moreover, FIG. 62 illustrates a schematic back side external appearanceconfiguration of the 1-in-1 module, which is the power modulesemiconductor device 2 according to the second embodiment. The secondcopper plate layer 10 b disposed on the back side surface of the ceramicsubstrate 10 functions as a heat spreader.

As shown in FIGS. 58-63 , the power module semiconductor device 2according to the second embodiment includes: a ceramic substrate 10; afirst pattern 10 a (D) of a first copper plate layer 10 a disposed onthe surface of the ceramic substrate 10; a semiconductor chip Q disposedon the first pattern D; a first pillar connection electrode 18 _(p)disposed on the first pattern D; and a drain terminal DT connected tothe first pillar connection electrode 18 _(p).

Moreover, the power module semiconductor device 2 may include: a secondpattern 10 s (S) of the first copper plate layer 10 a; a second pillarconnection electrode 18 _(n) disposed on the second pattern 10 a (S) ;and a source terminal ST connected to the second pillar connectionelectrode 18 _(n).

Moreover, the power module semiconductor device 2 may include a pillarelectrode 20 disposed on the semiconductor chip Q.

Moreover, although the illustration is omitted herein, the power modulesemiconductor device 2 may include a first diode DI disposed so as to beadjacent to the semiconductor chip Q on the first pattern D.Furthermore, in some cases, the diode DI may be disposed on the firstpattern D in all the chips.

Moreover, the power module semiconductor device 2 may include an uppersurface plate electrode 22 disposed on the pillar electrode 20.

Moreover, although the illustration is omitted herein, the power modulesemiconductor device 2 may include an upper surface plate electrode 22disposed on the pillar electrode 20 and connected to the anode electrodeA of the diode DI.

Also in the power module semiconductor device 2 according to the secondembodiment, the semiconductor chip Q is formed of an SiC MOSFET, forexample, and the diode DI is formed of an SiC SBD, for example.Moreover, a thermistor is connected to between the thermistor connectingterminals B1, B2 on the ceramic substrate 10, and is used for thermalsensing of the power module semiconductor device 2 according to thesecond embodiment.

Techniques, e.g. solder bonding, metallic bonding using metallicparticles, solid phase diffusion bonding, and transient liquid phase(TLP) bonding, are applicable to form a bonded structure of eachstructural member.

In this case, the signal terminals CS, G, SS, B1, B2 are arranged so asto be extended in the vertical direction with respect to the mainsurface of the insulating substrate 10, as shown in FIGS. 58-60 .

Moreover, the vertical direction with respect to the main surface of theinsulating substrate 10 is equal to the vertical direction with respectto the main surface of the resin layer 12.

Moreover, the signal terminals CS, G, SS, B1, B2 may be linearlyarranged on the main surface of the resin layer 12, as shown in FIG. 58.

Moreover, the power module semiconductor device 2 according to thesecond embodiment includes electrode patterns CSP, GSP, SSP arranged soas to be adjacent to the semiconductor chip Q on the insulatingsubstrate 10. In particular, in the power module semiconductor device 2according to the second embodiment, the electrode patterns CSP, GSP, SSPare arranged so as to be adjacent to one another and to be surrounded bythe semiconductor chip Q at a center portion of the insulating substrate10.

As shown in FIG. 61 , the current sense terminal CS is connected bysoldering to an electrode pattern connected by wire bonding to thecurrent sense electrode pattern CSP, and arranged so as to be extendedin the vertical direction with respect to the main surface of theinsulating substrate 10.

As shown in FIG. 61 , the gate signal terminal G is connected bysoldering to an electrode pattern connected by wire bonding to the gatesignal electrode pattern GSP, and arranged so as to be extended in thevertical direction with respect to the main surface of the insulatingsubstrate 10.

As shown in FIGS. 61 and 63 , the source sense terminal SS is connectedby soldering to an electrode pattern connected by wire bonding to thesource sense electrode pattern SSP, and arranged so as to be extended inthe vertical direction with respect to the main surface of theinsulating substrate 10.

In addition, in the power module semiconductor device 2 according to thesecond embodiment, the signal terminals CS, G, SS may be directlyconnected to the electrode patterns CSP, GSP, SSP by soldering.

Since other configurations are the same as those of the power modulesemiconductor device 2 according to the first embodiment, the duplicateddescription is omitted. Moreover, since the fabrication method of thepower module semiconductor device according to the second embodiment andthe metallic mold are the same as those of the power modulesemiconductor device 2 according to the first embodiment, the duplicateddescription is omitted.

According to the second embodiment, there can be provided the powermodule semiconductor device and the inverter equipment, in which thewhole inverter equipment can be efficiently composed by arranging thesignal terminals in the substantially vertical direction from the moldbody, and the parasitic component can also be reduced since the wiringsin the module can also be output by the shortest distance.

According to the second embodiment, there can be provided the powermodule semiconductor device having a vertical terminal transfermold inwhich structure thereof is simple and the number of parts is reduced,thereby achieving space saving of the 1-in-1 thin type SiC power module,since no socket is used.

Third Embodiment

FIG. 64 illustrates a schematic bird’s-eye view configuration of a1-in-1 module, which is a power module semiconductor device 2 accordingto a third embodiment.

The power module semiconductor device 2 according to the thirdembodiment has a configuration of 1-in-1 module. More specifically, oneMOSFET Q is included in one module. In the power module semiconductordevice 2 according to the third embodiment, six chips (MOS transistor ×6) can be mounted thereon, as an example, and a maximum of six pieces ofthe MOSFETs Q can be respectively connected to one another in parallel.Note that it is also possible to mount a part of six pieces of the chipsfor the diode DI.

A schematic circuit expression of the 1-in-1 module, which is a powermodule semiconductor device 2 according to the third embodiment issimilarly illustrated as FIG. 1 , and a detailed circuit expression issimilarly illustrated as FIG. 2 .

In the power module semiconductor device 2 according to the thirdembodiment, the power terminals ST, DT are arranged so as to be extendedalong in a parallel direction with a main surface of the resin layer 12from a one side surface of the resin layer 12 in the parallel direction.

As shown in FIG. 64 , the power module semiconductor device 2 accordingto the third embodiment includes: a drain terminal DT and a sourceterminal ST which are arranged on a first side of the ceramic substrate10 covered with the resin layer 12; and signal terminals SS, G, CSarranged near a side opposite to the first side in a vertical directionwith respect to the ceramic substrate 10. In this case, the signalterminals SS, G, CS are respectively connected to a source senseterminal, a gate signal terminal, and a current sense terminal of thesemiconductor chip Q. In addition, although illustration is omitted, thepower module semiconductor device 2 may further includes thermistorconnecting terminals B1, B2 arranged near a side opposite to the firstside in a vertical direction with respect to the ceramic substrate 10.In this case, the source terminal ST corresponds to the first powerinput terminal, and the drain terminal DT correspond to the second powerinput terminal.

Moreover, FIG. 65 illustrates a schematic planar pattern configurationof the 1-in-1 module, which is the power module semiconductor device 2according to the third embodiment. FIG. 67 illustrates a schematiccross-sectional structure taken in the line XXIV-XXIV of FIG. 65 .

Moreover, FIG. 66 illustrates a schematic back side external appearanceconfiguration of the 1-in-1 module, which is the power modulesemiconductor device 2 according to the third embodiment. The secondcopper plate layer 10 b disposed on the back side surface of the ceramicsubstrate 10 functions as a heat spreader.

As shown in FIGS. 64-65 , the power module semiconductor device 2according to the third embodiment includes: a ceramic substrate 10; afirst pattern 10 a (D) of a first copper plate layer 10 a disposed onthe surface of the ceramic substrate 10; a semiconductor chip Q disposedon the first pattern D; a first pillar connection electrode 18 _(p)disposed on the first pattern D; and a drain terminal DT connected tothe first pillar connection electrode 18 _(p).

Moreover, the power module semiconductor device 2 may include: a secondpattern 10 s (S) of the first copper plate layer 10 a; a second pillarconnection electrode 18 _(n) disposed on the second pattern 10 a (S) ;and a source terminal ST connected to the second pillar connectionelectrode 18 _(n).

Moreover, although the illustration is omitted herein, the power modulesemiconductor device 2 may include a first diode DI disposed so as to beadjacent to the semiconductor chip Q on the first pattern D.Furthermore, in some cases, the diode DI may be disposed on the firstpattern D in all the chips.

Also in the power module semiconductor device 2 according to the thirdembodiment, the semiconductor chip Q is formed of an SiC MOSFET, forexample, and the diode DI is formed of an SiC SBD, for example.

In this case, the signal terminals CS, G, SS are arranged so as to beextended in the vertical direction with respect to the main surface ofthe insulating substrate 10, as shown in FIGS. 64-65 .

Moreover, the vertical direction with respect to the main surface of theinsulating substrate 10 is equal to the vertical direction with respectto the main surface of the resin layer 12.

Moreover, the signal terminals CS, G, SS may be linearly arranged on themain surface of the resin layer 12, as shown in FIG. 64 .

Moreover, the power module semiconductor device 2 according to the thirdembodiment includes electrode patterns CSP, GSP, SSP arranged so as tobe adjacent to the semiconductor chip Q on the insulating substrate 10.In particular, in the power module semiconductor device 2 according tothe third embodiment, the electrode patterns CSP, GSP, SSP are arrangedso as to be adjacent to one another and to surround six pieces of thesemiconductor chips Q at a peripheral part of the insulating substrate10.

Moreover, the power module semiconductor device 2 according to the thirdembodiment includes electrode patterns CSP, GSP, SSP arranged so as tobe adjacent to the semiconductor chip Q on the insulating substrate 10,and the signal terminals CS, G, SS may be connected to the electrodepatterns CSP, GSP, SSP with soldering.

As shown in FIG. 65 , the current sense terminal CS is connected bysoldering to the current sense electrode pattern CSP, and arranged so asto be extended in the vertical direction with respect to the mainsurface of the insulating substrate 10.

As shown in FIG. 65 , the gate signal terminal G is connected bysoldering to the gate signal electrode pattern GSP, and arranged so asto be extended in the vertical direction with respect to the mainsurface of the insulating substrate 10.

As shown in FIG. 65 , the source sense terminal SS is connected bysoldering to the source sense electrode pattern SSP, and arranged so asto be extended in the vertical direction with respect to the mainsurface of the insulating substrate 10.

An enlarged schematic cross-sectional structure of the portion A of FIG.67 is illustrated as shown in FIG. 68 . Moreover, a schematic planarpattern configuration of the portion B of FIG. 68 is illustrated asshown in FIG. 69 , and a schematic cross-sectional structure taken inthe line XXV-XXV of FIG. 69 is illustrated as shown in FIG. 70 .

As shown in FIGS. 65-70 , the power module semiconductor device 2according to the third embodiment includes: a semiconductor chip Q(100); source pad electrodes SP, SP arranged on the semiconductor chipQ; an insulating film 60 arranged around the source pad electrodes SP,SP on the semiconductor chip Q, the insulating film 60 having a filmthickness thicker than that of the source pad electrodes SP, SP; and anupper surface plate electrode 22 disposed on the insulating film 60 andthe source pad electrodes SP. In this case, the semiconductor chipQ(100) may be arranged on a first pattern 10 a(D) of the copper platelayer 10 a disposed on the surface of the ceramic substrate 10, as shownin FIG. 67 .

Moreover, the upper surface plate electrode 22 and the source padelectrode SP may be connected to each other via the soldering layer 80,as shown in FIG. 70 .

Moreover, the insulating film 60 may be formed of a polyimide film. Itis preferable that a thickness thereof is equal to or greater than 50µm, for example, at a point that insulation can be easily secured and aheight thereof can be reduced. Alternatively, the insulating film 60 maybe formed of ceramics or its layer. Also in this case, it is preferablethat a thickness thereof is equal to or greater than 50 µm, for example,at a point that insulation can be easily secured and a height thereofcan be reduced.

As shown in FIGS. 64-70 , since the power module semiconductor device 2according to the third embodiment can be formed of a thin type SiC powermodule without distribution poles, there can be provided the powermodule semiconductor device in which physical size and weight can bereduced.

Moreover, in the power module semiconductor device according to thethird embodiment, as shown in FIG. 65 , three chips of semiconductorchips Q are arranged at a center portion of the ceramic substrate 10 intwo rows. Moreover, two-circuit groups of signal patterns GSP, CSP, SSPare disposed in L-shaped structure on a peripheral part of the ceramicsubstrate 10. As shown in FIG. 65 the two-circuit groups of signalpatterns GSP, CSP, SSP are connected in common to one another, and arealso connected to a source sense terminal, a gate signal terminal, and acurrent sense terminal of the semiconductor chip Q.

A GP terminal, an SP terminal, and a CS terminal of each chip areconnected with bonding wires to the groups of signal patterns GSP, CSP,SSP having L-shaped structure disposed on the peripheral part.

Furthermore, as shown in FIG. 65 , the upper surface plate electrode 22,22S is disposed so as to not cover directly above the group of bondingwires extended from the semiconductor chip Q, in planar view observedfrom the thickness direction of the ceramic substrate 10.

Since the group of signal patterns GSP, CSP, SSP are formed in L-shapedstructure, it becomes possible to dispose wirings of the bonding wiresfrom the tree-chips MOS transistor in a shorter distance without across-wiring. Furthermore, the upper surface plate electrode 22, 22S canalso be disposed so as to not cover the bonding wires extended from thechips of the semiconductor chip.

Techniques, e.g. solder bonding, metallic bonding using metallicparticles, solid phase diffusion bonding, and transient liquid phase(TLP) bonding, are applicable to form a bonded structure of eachstructural member.

Since other configurations are the same as those of the power modulesemiconductor device 1 according to the first embodiment, the duplicateddescription is omitted. Moreover, since the fabrication method of thepower module semiconductor device according to the third embodiment andthe metallic mold are the same as those of the first embodiment, theduplicated description is omitted.

According to the third embodiment, there can be provided the powermodule semiconductor device and the inverter equipment, in which thewhole inverter equipment can be efficiently composed by arranging thesignal terminals in the substantially vertical direction from the moldbody, and the parasitic component can also be reduced since the wiringsin the module can also be output by the shortest distance.

According to the third embodiment, there can be provided the powermodule semiconductor device having a vertical terminal transfermold inwhich structure thereof is simple and the number of parts is reduced,thereby achieving space saving of the 1-in-1 thin type SiC power module,since no socket is used.

Fourth Embodiment

FIG. 71 illustrates a schematic circuit representative of the 2-in-1module, which is the power module semiconductor device according to thefourth embodiment.

The power module semiconductor device 2 according to the fourthembodiment has a configuration of 2-in-1 module. More specifically, twoMOSFETs Q1, Q4 are included in one module.

As an example, four chips (MOS transistor × 3, diode × 1) can be mountedin one side of the 2-in-1 module, and a maximum of three MOSFETs Q1, Q4respectively can be connected to one another in parallel. In this case,the MOSFETs Q1, Q4 have a size of approximately 5 mm × approximately 5mm.

FIG. 72 illustrates a schematic bird’s-eye view configuration of the2-in-1 module, which is the power module semiconductor device 1according to the fourth embodiment.

Moreover, FIG. 73 illustrates a schematic bird’s-eye view configurationof the power module semiconductor device 2 before forming a resin layer12 thereon.

As shown in FIGS. 72 and 73 , the power module semiconductor device 1according to the fourth embodiment includes: a positive side power inputterminal P and a negative side power input terminal N disposed on afirst side of a ceramic substrate 10 covered with a resin layer 12;signal terminals S1, G1, T1 arranged near a second side adjacent to thefirst side in a vertical direction with respect to the ceramic substrate10; an output terminal O arranged on a third side opposite to the firstside; thermistor connecting terminals B1, B2 arranged near the thirdside in the vertical direction with respect to the ceramic substrate 10;and signal terminals S4, G4, T4 arranged near a fourth side opposite tothe second side in the vertical direction with respect to the ceramicsubstrate 10.

In the power module semiconductor device 1 according to the thirdembodiment, the power terminals P, N are arranged so as to be extendedalong in a parallel direction with a main surface of the resin layer 12from a one side surface of the resin layer 12 in the parallel direction,and the output terminal O is arranged so as to be extended from otherside surface of the resin layer 12 in an opposite direction to the powerterminals P, N, along a parallel direction with the main surface of theresin layer 12.

The signal terminals S1, G1, T1 are respectively connected to a sourcesense terminal, a gate signal terminal, and a current sense terminal ofthe semiconductor chip Q1 shown in FIG. 71 , and the signal terminalsS4, G4, T4 are respectively connected to a source sense terminal, gatesignal terminal, and current sense terminal of the semiconductor chip Q4shown in FIG. 71 . Moreover, the negative side power input terminal Ncorresponds to a first power input terminal, and the positive side powerinput terminal P corresponds to a second power input terminal.

Furthermore, FIG. 74A illustrates a schematic bird’s-eye viewconfiguration of the power module semiconductor device 1, before formingthe upper surface plate electrodes 22 ₁, 22 ₄ thereon.

Moreover, FIG. 75 illustrates a schematic planar pattern configurationof a 2-in-1 module, which is the power module semiconductor deviceaccording to the fourth embodiment. FIG. 76 illustrates a schematiccross-sectional structure taken in the line XXVI-XXVI of FIG. 75 .

Moreover, in the power module semiconductor device 1 according to thefourth embodiment, as shown in FIG. 75 , the upper surface plateelectrodes 22 ₁, 22 ₄ are disposed so as to not cover bonding wiresextended from the chip of the semiconductor chips Q1, Q4.

In the power module semiconductor device 1 according to the fourthembodiment, since the signal terminals (G1, S1, T1) and (G4, S4, T4) arealternately arranged with respect to each other in a vertical directionwith respect to the ceramic substrate near a side opposite thereto, thesignal terminals (G1, S1, T1) and (G4, S4, T4) are not contacted withrespect to each other even when the power modules are arranged inparallel in the case of assembling a three phase inverter circuit,thereby achieving space-saving of the power module size.

Techniques, e.g. solder bonding, metallic bonding using metallicparticles, solid phase diffusion bonding, and transient liquid phase(TLP) bonding, are applicable to form a bonded structure of eachstructural member.

As shown in FIGS. 72-76 , the power module semiconductor device 1according to the fourth embodiment includes: a ceramic substrate 10; afirst pattern D(K4) of a first copper plate layer 10 a disposed on asurface of the ceramic substrate 10; a semiconductor chip Q4 disposed onthe first pattern D(K4); power terminals N, O and signal terminals S4,G4, T4, both electrically connected to the semiconductor chip Q4; and aresin layer 12 configured to cover the semiconductor chip Q4 and theinsulating substrate 10. In this case, the signal terminals S4, G4, G,T4 are mutually disposed so as to be extended in a vertical directionwith respect to a main surface of the insulating substrate 10.

Moreover, the power module semiconductor device 1 includes: a firstpillar connection electrode 18 _(o) disposed on first pattern D (K4);and an output terminal O connected to the first pillar connectionelectrode 18 _(o).

Moreover, the power module semiconductor device 1 includes: a secondpattern EP of the first copper plate layer 10 a; a second pillarconnection electrode 18 _(n) disposed on the second pattern EP; and anegative side power input terminal N connected to the second pillarconnection electrode 18 _(n).

Moreover, the first pillar connection electrode 18 _(o) may include apillar extended electrode 25 disposed on the first pattern D(K4).

Moreover, the power module semiconductor device 1 may include a sourcepillar electrode 20 ₄ disposed on the semiconductor chip Q4.

Moreover, the power module semiconductor device 1 may include a firstdiode D4 disposed on the first pattern D(K4) so as to be adjacent to thesemiconductor chip Q4.

Moreover, the power module semiconductor device 1 may include a firstupper surface plate electrode 221 disposed on the source pillarelectrode 204, and connected to the anode electrode A4 of the firstdiode D4.

Moreover, the semiconductor chip Q1 disposed on the third pattern D(K1)of the first copper plate layer 10 a, and the power terminals P and thesignal terminals S1, G1, T1 electrically connected to the semiconductorchip Q1 are covered with the resin layer 12, in conjunction with theinsulating substrate 10, as well as the semiconductor chip Q4. In thiscase, the signal terminals S1, G1, T1 are mutually disposed so as to beextended in a vertical direction with respect to a main surface of theinsulating substrate 10.

Moreover, the power module semiconductor device 1 may include a seconddiode D1 disposed on the third pattern D(K1) so as to be adjacent to thesemiconductor chip Q1.

Moreover, the power module semiconductor device 1 may include a sourcepillar electrode 20 ₁ disposed on the semiconductor chip Q4.

Moreover, the power module semiconductor device 1 may include a secondupper surface plate electrode 22 ₄ disposed on the source pillarelectrode 20 ₁, and connected to the anode electrode A4 of the seconddiode D1.

In this case the vertical direction with respect to the main surface ofthe insulating substrate 10 is equal to the vertical direction withrespect to the main surface of the resin layer 12.

Moreover, the signal terminals S1, G1, T1 and the signal terminals S4,G4, T4 may be respectively linearly disposed on the main surface of theresin layer 12, as shown in FIG. 72 .

Moreover, as shown in FIG. 75 , the power module semiconductor device 2according to the fourth embodiment includes electrode patterns CSP4,GSP4, SSP4 disposed so as to be adjacent to the semiconductor chip Q onthe insulating substrate 10, and the signal terminals S4, G4, T4 may beconnected to the electrode patterns CSP4, GSP4, SSP4 with soldering.

Similarly, as shown in FIG. 75 , the power module semiconductor device 2according to the fourth embodiment includes electrode patterns CSP1,GSP1, SSP1 disposed so as to be adjacent to the semiconductor chip Q1 onthe insulating substrate 10, and the signal terminals S1, G1, T1 may beconnected to the electrode patterns CSP1, GSP1, SSP1 with soldering.

Moreover, the power module semiconductor device 1 according to thefourth embodiment may include a positive side power input terminal Pconnected to the third pattern D(K1).

FIG. 77 illustrates a schematic back side external appearanceconfiguration of a 2-in-1 module, which is the power modulesemiconductor device according to the fourth embodiment. The secondcopper plate layer 10 b disposed on the back side surface of the ceramicsubstrate 10 functions as a heat spreader.

In the power module semiconductor device 1 according to the fourthembodiment, the semiconductor chips Q1, Q4 are formed of SiC MOSFET, forexample, and the diodes D1, 4 are formed of SiC SBD, for example.Moreover, a thermistor is connected to between the thermistor connectingterminals B1, B2 disposed in a vertical direction with respect to theceramic substrate 10, and is used for thermal sensing of the powermodule semiconductor device 1 according to the fourth embodiment.

A plurality of chips of the semiconductor chips Q1, Q4 are disposed onthe surface of the ceramic substrate 10 at a position apart from oneanother in planar view observed from a thickness direction of theceramic substrate 10, and are resin-molded with the resin layer 12.

Moreover, the pillar connection electrodes 18 _(o), 18 _(n) may beformed of electrode materials of which the value of CTE is relativelysmaller, e.g. CuMo, Cu, etc.

The upper surface plate electrodes 22 ₁, 22 ₄ portions may be formed ofelectrode materials of which the value of CTE is relatively smaller,e.g. CuMo, Cu, etc.

The source pillar electrodes 20 ₁, 20 ₄ portions may be formed ofelectrode materials of which the value of CTE is relatively smaller,e.g. CuMo, Cu, etc.

Herein, a separation distance along the surface between the uppersurface plate electrodes 22 ₁, 22 ₄ is called a creepage distance. Avalue of the creepage distance thereof is approximately 6 mm, forexample.

FIG. 78 illustrates a schematic plane configuration of three pieces ofthe power module semiconductor devices according to the fourthembodiment disposed in parallel to one another in order to drive thethree-phase AC inverter.

FIG. 79 illustrates a schematic plane configuration of three pieces ofthe power module semiconductor devices according to the fourthembodiment disposed in parallel to one another for driving thethree-phase AC inverter.

In the power module semiconductor device 1 according to the fourthembodiment, the signal terminals (G1, S1, T1) and (G4, S4, T4) aredisposed in the vertical direction with respect to the ceramicsubstrate, thereby reducing an occupied area in the case of disposingthe power module semiconductor devices 1 in parallel to one another asshown in FIG. 78 . Accordingly, reduction in size and weight of thewhole device and can be achieved.

Since other configurations are the same as those of the power modulesemiconductor device 1 according to the first embodiment, the duplicateddescription is omitted. Moreover, since the fabrication method of thepower module semiconductor device according to the fourth embodiment andthe metallic mold are the same as those of the first embodiment, theduplicated description is omitted.

According to the fourth embodiment, there can be provided the powermodule semiconductor device and the inverter equipment, in which thewhole inverter equipment can be efficiently composed by disposing thesignal terminals in the substantially vertical direction from the moldbody, and the parasitic component can also be reduced since the wiringsin the module can also be output by the shortest distance.

According to the fourth embodiment, there can be provided the powermodule semiconductor device having a vertical terminal transfermold inwhich structure thereof is simple and the number of parts is reduced,thereby achieving space saving of the 1-in-1 thin type SiC power module,since no socket is used.

Although the 1-in-1 module and the 2-in-1 module have been explained, asthe module semiconductor devices according to the embodiments, it canalso form in a Four-in-One (4-in-1) configuration, a Six-in-One (6-in-1)configuration, etc. Furthermore, module configurations of combinationwith a DC-DC converter can also be realized.

In the module semiconductor devices according to the embodiments,although to mount the examples of SBD or SiC MOSFETs have been mainlyexplained as the semiconductor elements, it may not be limited to suchexamples, but may adopt other power semiconductor devices. For example,power devices of any one of Si based IGBT, GaN based HEMT or AlN basedpower device can be applied thereto.

In the module semiconductor devices according to the embodiments, theremay be adopted a structure of mounting singular or a plurality ofsemiconductor elements on one metallic block. Moreover, a plurality ofSBDs, MOSFETs, etc. may be mounted on one metallic block. In this case,the metallic block units may mutually form side surface bonding by usingmetallic bonding with metallic particles or solid phase diffusionbonding. Moreover, also input output terminals portion can be formed byusing the metallic bonding with metallic particles or the solid phasediffusion bonding.

In addition, in the module semiconductor devices according to theembodiments, the whole module semiconductor devices are eventuallysealed with a resin, e.g. a transfermold resin, etc.

As mentioned above, according to the embodiments, there can be providedthe low series inductance inverter system with the power modulesemiconductor device having the straight wiring structure and the 1-in-1TPM.

According to the embodiments, there can be provided the power modulesemiconductor device having a vertical terminal transfermold, therebyachieving space saving, the fabrication method of such a power modulesemiconductor device, and the metallic mold thereof.

Other Embodiments

While the present invention is described in accordance with theaforementioned embodiments, it should be understood that the descriptionand drawings that configure part of this disclosure are not intended tolimit the embodiments. This disclosure makes clear a variety ofalternative embodiments, working examples, and operational techniquesfor those skilled in the art.

Such being the case, the embodiments cover a variety of embodiments,whether described or not.

INDUSTRIAL APPLICABILITY

The power module semiconductor device and the inverter system accordingto the embodiments is applicable to an overall power device, e.g. an SiCpower semiconductor module, an intelligent power module, etc., and isapplicable to wide applicable fields, in particular fields for whichreduction in size and weight is required, e.g. an inverter, a converter,etc. used for in-vehicle and solar cells, industrial equipment,household equipment, etc.

1-20. (canceled)
 21. A power module semiconductor device comprising: aninsulating substrate; a first pattern of a copper plate layer disposedon one surface of the insulating substrate; a semiconductor chipdisposed on the first pattern, the semiconductor chip configured toperform switching operation between a power electrode and an outputelectrode in accordance with a signal input to a control electrode; apower terminal, an output terminal, and a signal terminal electricallyconnected respectively to the power electrode, the output electrode, andthe control electrode of the semiconductor chip; and a resin layerhaving a substantially rectangular shape in planar view configured tocover the semiconductor chip and the insulating substrate, wherein thepower terminal and the output terminal are respectively disposed so asto be extended from mutually opposite side surfaces of the resin layeralong a long-side direction of the resin layer, in parallel to a mainsurface of the resin layer in opposite directions, and the signalterminal is disposed so as to be extended upward in a vertical directionwith respect to the one surface of the insulating substrate.
 22. Thepower module semiconductor device according to claim 21, wherein aplurality of the semiconductor chips are disposed to be connected to oneanother in parallel.
 23. The power module semiconductor device accordingto claim 21, wherein the semiconductor chip is a SiC power device. 24.The power module semiconductor device according to claim 21, wherein thesemiconductor chip is a MOSFET.
 25. The power module semiconductordevice according to claim 21, further comprising a second patternelectrically connected to the control electrode disposed on the onesurface of the insulating substrate.
 26. The power module semiconductordevice according to claim 21, further comprising a third pattern formedon the other surface of the insulating substrate opposite to the firstpattern.
 27. The power module semiconductor device according to claim21, wherein at least a portion of the third pattern is exposed from theresin layer.
 28. The power module semiconductor device according toclaim 22, wherein the plurality of semiconductor chips are disposed tobe connected to one another in parallel along the long-side direction ofthe resin layer.
 29. The power module semiconductor device according toclaim 27, wherein the third pattern functions as a heat spreader. 30.The power module semiconductor device according to claim 22, wherein athickness of the third pattern is same as a thickness of the firstpattern in a cross sectional view.
 31. The power module semiconductordevice according to claim 21, wherein the vertical direction withrespect to the one surface of the insulating substrate is equal to avertical direction with respect to the main surface of the resin layer.32. The power module semiconductor device according to claim 21, whereinthe signal terminal comprises a gate signal terminal and a sensorterminal.
 33. The power module semiconductor device according to claim25, wherein the signal terminal is connected to the electrode patternwith soldering.
 34. The power module semiconductor device according toclaim 32, wherein the sensor terminal comprising a source sense terminaland a current sense terminal.
 35. The power module semiconductor deviceaccording to claim 21, wherein the power terminal and the outputterminal constitute a straight wiring structure.
 36. The power modulesemiconductor device according to claim 21, wherein the power terminaland the output terminal are disposed in a thickness direction of theresin layer so as to form a predetermined step height.
 37. The powermodule semiconductor device according to claim 21, wherein the resinlayer is formed of a transfer mold resin, an epoxy based resin, or asilicone based resin.